Reverse Lift-Off Process and Application for Cu-Zr-Ti Metallic Glass Thick Film Structures

2015 ◽  
Vol 9 (6) ◽  
pp. 646-654 ◽  
Author(s):  
Shigetaka Watanabe ◽  
◽  
Junpei Sakurai ◽  
Mizue Mizoshiri ◽  
Seiichi Hata
Keyword(s):  
Amorphous Alloy ◽  
Metallic Glass ◽  
Thick Film ◽  
Cross Section ◽  
Rectangular Cross Section ◽  
Film Structure ◽  
Sputter Deposition ◽  
Uniform Thickness ◽  
Target Structure ◽  
Lift Off

In technologies involving micro electromechanical systems, lift-off processes combined with sputter deposition are general patterning methods for the formation of amorphous alloy thick film structures. However, the thicknesses of structures fabricated in this manner are not uniform because sputtered particles are blocked by the sidewalls of the lift-off layer. In this paper, a reverse lift-off process is proposed as a new patterning method for fabricating amorphous alloy thick film structures of uniform thickness. In the reverse lift-off process, a template of the desired structure is formed on top of the chosen substrate. The thick film structure is then formed by sputter deposition on the top surface of the template. In contrast to a conventional lift-off process, here the thickness of the structure is uniform because there is nothing to hinder the sputtered particles. To demonstrate this process, we successfully fabricated a Cu-Zr-Ti metallic glass thick film structure with a uniform film thickness and a rectangular cross section across different target structure widths and thicknesses. This demonstrates that the reverse lift-off process is more suitable than conventional lift-off processes for the fabrication of metallic glass thick film structures.

scholarly journals Hydroelastic waves propagating along a frozen channel with non-uniform thickness of ice

2021 ◽  
Vol 2057 (1) ◽  
pp. 012021
Author(s):  
K N Zavyalova ◽  
K A Shishmarev ◽  
E A Batyaev ◽  
T I Khabakhpasheva
Keyword(s):  
Cross Section ◽  
Elastic Plate ◽  
Rectangular Cross Section ◽  
Normal Modes ◽  
Elastic Beam ◽  
Wave Profile ◽  
Constant Thickness ◽  
Ice Thickness ◽  
Thin Elastic Plate ◽  
Uniform Thickness

Abstract Hydroelastic waves propagating along a channel covered with ice of non-uniform thickness are considered. The channel has a rectangular cross section. The fluid in the channel is inviscid and incompressible. The ice is modeled as a thin elastic plate. The ice thickness changes linearly. The problem is reduced to the problem of the wave profile across the channel, which is solved using the normal modes of an elastic beam with non-uniform thickness. It is shown that with the decrease in the change in the ice thickness, the modes approach the normal modes of an elastic beam with a constant thickness. The behavior of the dispersion relations of the hydroelastic waves depending on the parameter describing the change in the ice thickness is studied.

Fabrication of Cu–Zr–Ti thick film metallic glass structure by double metal mask lift-off process

2015 ◽  
Vol 135 ◽  
pp. 45-51 ◽  
Author(s):  
Shigetaka Watanabe ◽  
Junpei Sakurai ◽  
Seiichi Hata
Keyword(s):  
Metallic Glass ◽  
Thick Film ◽  
Glass Structure ◽  
Metal Mask ◽  
Lift Off

J164022 Fabrication of Cu-Zr-Ti thick film structure of metallic glass

2012 ◽  
Vol 2012 (0) ◽  
pp. _J164022-1-_J164022-4
Author(s):  
Sigetaka Watanabe ◽  
Junpei Sakurai ◽  
Seiichi Hata
Keyword(s):  
Metallic Glass ◽  
Thick Film ◽  
Film Structure

scholarly journals Designing for People’s Safety on Flooded Streets: Uncertainties and the Influence of the Cross-Section Shape, Roughness and Slopes on Hazard Criteria

Water ◽  
2021 ◽  
Vol 13 (15) ◽  
pp. 2119
Author(s):  
Luís Mesquita David ◽  
Rita Fernandes de Carvalho
Keyword(s):  
Cross Section ◽  
Overland Flow ◽  
Rectangular Cross Section ◽  
Safety Hazard ◽  
Cross Section Shape ◽  
Section Shape ◽  
Flood Flows ◽  
The Cross ◽  
Flooding Risk

Designing for exceedance events consists in designing a continuous route for overland flow to deal with flows exceeding the sewer system’s capacity and to mitigate flooding risk. A review is carried out here on flood safety/hazard criteria, which generally establish thresholds for the water depth and flood velocity, or a relationship between them. The effects of the cross-section shape, roughness and slope of streets in meeting the criteria are evaluated based on equations, graphical results and one case study. An expedited method for the verification of safety criteria based solely on flow is presented, saving efforts in detailing models and increasing confidence in the results from simplified models. The method is valid for 0.1 m2/s 0.5 m2/s. The results showed that a street with a 1.8% slope, 75 m1/3s−1 and a rectangular cross-section complies with the threshold 0.3 m2/s for twice the flow of a street with the same width but with a conventional cross-section shape. The flow will be four times greater for a 15% street slope. The results also highlighted that the flood flows can vary significantly along the streets depending on the sewers’ roughness and the flow transfers between the major and minor systems, such that the effort detailing a street’s cross-section must be balanced with all of the other sources of uncertainty.

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