Oxygen Ratio Effect on Zinc Oxide Films Fabricated by Radio Frequency Magnetron Sputtering for Photoluminescence Type Gas Sensor Application

2021 28th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) ◽

10.23919/am-fpd52126.2021.9499209 ◽

2021 ◽

Author(s):

Htet Su Wai ◽

Testsuya Ueda ◽

Chaoyang Li

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Oxide Films ◽

Radio Frequency Magnetron Sputtering ◽

Ratio Effect ◽

Sensor Application ◽

Zinc Oxide Films ◽

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Preparation of Naturally Textured Aluminum-Doped Zinc Oxide Films on Flexible Poly(ether sulfone) Substrate by Radio Frequency Magnetron Sputtering

Japanese Journal of Applied Physics ◽

10.7567/jjap.52.031101 ◽

2013 ◽

Vol 52 (3R) ◽

pp. 031101 ◽

Author(s):

Jae Seok An ◽

Jin Koog Shin ◽

Jong Ho Lee ◽

Bum Ho Choi

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Zinc Oxide Films ◽

Aluminum Doped Zinc Oxide

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The influence of titanium on the properties of zinc oxide films deposited by radio frequency magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2007.09.094 ◽

2008 ◽

Vol 254 (9) ◽

pp. 2615-2620 ◽

Author(s):

Jeng-Lin Chung ◽

Jyh-Chen Chen ◽

Chung-Jen Tseng

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Zinc Oxide Films

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Properties of Indium–Zinc-Oxide Films Synthesized by Radio Frequency Magnetron Sputtering Based on Gas Phase Monitoring Using Multi-Micro Hollow Cathode Lamp

Japanese Journal of Applied Physics ◽

10.1143/jjap.51.116202 ◽

2012 ◽

Vol 51 ◽

pp. 116202

Author(s):

Mari Inoue ◽

Takayuki Ohta ◽

Naoki Takota ◽

Shigeki Tsuchitani ◽

Seigo Takashima ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Gas Phase ◽

Hollow Cathode ◽

Oxide Films ◽

Radio Frequency Magnetron Sputtering ◽

Hollow Cathode Lamp ◽

Zinc Oxide Films ◽

Indium Zinc Oxide

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The characteristics of the gallium-doped zinc oxide films using radio frequency magnetron sputtering

2018 7th International Symposium on Next Generation Electronics (ISNE) ◽

10.1109/isne.2018.8394654 ◽

2018 ◽

Author(s):

Chia-Ching Wu ◽

Chih-Chin Yang ◽

Jun Zhi Wang ◽

Chia-Hon Chen

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Zinc Oxide Films

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Arsenic doped p-type zinc oxide films grown by radio frequency magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.3236578 ◽

2009 ◽

Vol 106 (7) ◽

pp. 073709 ◽

Author(s):

J. C. Fan ◽

C. Y. Zhu ◽

S. Fung ◽

Y. C. Zhong ◽

K. S. Wong ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Zinc Oxide Films ◽

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Structural, electrical and optical properties of aluminum doped zinc oxide films prepared by radio frequency magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.365556 ◽

1997 ◽

Vol 81 (12) ◽

pp. 7764-7772 ◽

Author(s):

Kun Ho Kim ◽

Ki Cheol Park ◽

Dae Young Ma

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Zinc Oxide Films ◽

Aluminum Doped Zinc Oxide

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Micro/nanomechanical properties of aluminum-doped zinc oxide films prepared by radio frequency magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2006.04.067 ◽

2006 ◽

Vol 201 (6) ◽

pp. 2547-2552 ◽

Author(s):

Li-Yu Lin ◽

Min-Chang Jeong ◽

Dae-Eun Kim ◽

Jae-Min Myoung

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Nanomechanical Properties ◽

Zinc Oxide Films ◽

Aluminum Doped Zinc Oxide

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Crystal, optical, and electrical characteristics of transparent conducting gallium-doped zinc oxide films deposited on flexible polyethylene naphthalate substrates using radio frequency magnetron sputtering

Materials Research Bulletin ◽

10.1016/j.materresbull.2016.03.017 ◽

2016 ◽

Vol 79 ◽

pp. 90-96 ◽

Author(s):

Huai-Shan Chin ◽

Long-Sun Chao ◽

Chia-Ching Wu

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Electrical Characteristics ◽

Radio Frequency Magnetron Sputtering ◽

Polyethylene Naphthalate ◽

Zinc Oxide Films ◽

Transparent Conducting

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Structural and optoelectronic properties of Al-doped zinc oxide films deposited on flexible substrates by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2011.05.017 ◽

2011 ◽

Vol 519 (22) ◽

pp. 7959-7965 ◽

Author(s):

C.H. Tseng ◽

C.H. Huang ◽

H.C. Chang ◽

D.Y. Chen ◽

C.P. Chou ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Oxide Films ◽

Optoelectronic Properties ◽

Radio Frequency Magnetron ◽

Flexible Substrates ◽

Radio Frequency Magnetron Sputtering ◽

Zinc Oxide Films ◽

Structural And Optoelectronic Properties

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Structural, electrical and optical properties of zirconium-doped zinc oxide films prepared by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2007.06.173 ◽

2008 ◽

Vol 516 (8) ◽

pp. 2017-2021 ◽

Author(s):

Maoshui Lv ◽

Xianwu Xiu ◽

Zhiyong Pang ◽

Ying Dai ◽

Lina Ye ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Zinc Oxide Films

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