Computationally efficient near-field radio frequency source localisation

Abstract We demonstrate that a passive non-contact diagnostic technique, radio emission spectroscopy (RES), provides a sensitive monitor of currents in a low pressure radio frequency (RF) plasma. A near field magnetic loop antenna was used to capture RF emissions from the plasma without perturbing it. The analysis was implemented for a capacitively coupled RF plasma with an RF supply at a frequency of 13.56 MHz. Real-time measurements are captured in scenarios relevant to contemporary challenges faced during semiconductor fabrication (e.g. window coating and wall disturbance). Exploration of the technique for key equipment parameters including applied RF power, chamber pressure, RF bias frequencies and chamber wall cleanliness shows sensitive and repeatable function. In particular, the induced RES signal was found to vary sensitively to pressure changes and we were able to detect pressure and power variations as low as ~2.5 %/mtorr and ~3.5 %/watt, respectively, during the plasma processing during a trial generic plasma process. Finally, we explored the ability of RES to monitor the operation of a multiple frequency low-pressure RF plasma system (f1 = 2 MHz, f2 = 162 MHz) and intermixing products which suggests strongly that the plasma sheaths are the primary source of this non-linear diode mixing effect.

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GENERATION OF LIGHT THROUGH PLASMA USING RADIO FREQUENCY SOURCE IN DISUSED FLUORESCENT TUBE

International Journal of Research -GRANTHAALAYAH ◽

10.29121/granthaalayah.v6.i2.2018.1554 ◽

2018 ◽

Vol 6 (2) ◽

pp. 130-145

Author(s):

Adekanmbi M ◽

Abumere E.O ◽

Amusan J.A

Keyword(s):

Radio Frequency ◽

Ground State ◽

Mercury Vapor ◽

Ionized Gas ◽

Frequency Signal ◽

Sufficient Energy ◽

Frequency Source ◽

Change State ◽

Radio Frequency Circuit ◽

Fluorescent Tube

Light has been generated through Plasma using radio frequency source in 4Ft 40W disused fluorescent tube. As against the thermionic and incandescence source of running a fluorescent tube which is actually difficult to get started due to the resistance of the gases enclosed inside, a Radio Frequency signal of 30MHz generated using a designed Hartley Oscillator is employed. The power of the signal generated is amplified from 231mW to 197.8W using a modeled inverter. The coupled Hartley oscillator and the inverter form an ionizing circuit. The gases inside fluorescent tube consist of mercury Vapor, argon, krypton or Neon. When sufficient energy is supplied to these gases, by the ionizing circuit, ionization and excitation takes place which makes otherwise neutral gases, to change state to a cloud of ionized gas called Plasma. When excited electrons in the gases return to the ground state they lose energy in packets called Photon. This Photon is ultraviolet light which is not visible to the human eye but when it strikes the walls of the tube coated with Phosphor it glows whereby light is generated. The high electric field Radio frequency circuit designed has generated light in a fluorescent tube without the use of starter and ballast. It has also generated light in otherwise “dead” or disused fluorescent bulbs.

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Design and Development Of Lecturer Attendance System Using Radio Frequency Identification (RFID)

International Journal of Computer Science Engineering ◽

10.21817/ijcsenet/2021/v10i1/211001010 ◽

2021 ◽

Vol 10 (1) ◽

pp. 15-27

Author(s):

I Gede Sujana Eka Putra ◽

Anthony Lee ◽

I Made Tirta Mahayana ◽

I Gede Agung Wicaksono Dharmayasa

Keyword(s):

Radio Frequency ◽

Radio Frequency Identification ◽

Web Application ◽

Academic Staff ◽

Near Field ◽

Literature Study ◽

Master Data ◽

Presence Data ◽

Frequency Identification ◽

The University

Lecturer attendance record is required by the university to know the presence of lecturers in teaching in class. In general condition, lecturer attendance is recorded on the attendance sheet, or input to web application accessed on a class computer. However, there are some problems in its implementation so that at the end, lecturer presence is carried out using a manual form where the academic staff needs to re-enter the lecturer attendance data into the applications. Based on the above, the authors designed and developed a lecturer attendance information system to record lecturers' attendance using radio frequency identification technology by implementing a near field communication card (NFC Card). The device used to record and read presence data during lectures, by tapping an Mi-fare NFC card to an NFC reader / writer device. The flow of this research method begins with a literature study of NFC card, observe the flow of lecture attendance process and data recorded into lecturer attendance sheet, analyzing the database design, the system design which has compatible with NFC reader and writer devices, designed system interface and continue to develop system. The result is system consists of master data, system attendance, verification and reporting module. The results show that NFC card implementation is more practical for lecturers in conducting lecture attendance and NFC card could be tapped out into an NFC device at a maximum distance up to 7 cm with the reading angle relative to NFC reader/writer with range 00 until 300 can read NFC Card.

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