scholarly journals Recent Plasma Processing Technology. Radical Measurements in Plasmas for Semiconductor Processing using Laser Spectroscopic Techniques.

1994 ◽  
Vol 60 (11) ◽  
pp. 1549-1553
Author(s):  
Toshio GOTO
Keyword(s):  
Plasma Processing ◽  
Processing Technology ◽  
Spectroscopic Techniques ◽  
Semiconductor Processing ◽  
Laser Spectroscopic

Structural properties of lifted hydrogen jet flames measured by laser spectroscopic techniques

2000 ◽  
Vol 121 (1-2) ◽  
pp. 367-377 ◽  
Author(s):  
A. Brockhinke ◽  
S. Haufe ◽  
K. Kohse-Höinghaus
Keyword(s):  
Structural Properties ◽  
Spectroscopic Techniques ◽  
Jet Flames ◽  
Laser Spectroscopic
Sign in / Sign up

Export Citation Format

Share Document