scholarly journals Crystallographic Characterization of Surface Damage in Diamond-Turned Single-Crystal Silicon.

1999 ◽  
Vol 65 (7) ◽  
pp. 992-996
Author(s):  
Takayuki SHIBATA ◽  
Shigeru FUJII ◽  
Atsushi ONO ◽  
Eiji MAKINO
Keyword(s):  
Single Crystal ◽  
Single Crystal Silicon ◽  
Surface Damage ◽  
Crystal Silicon

Nanoindentation Characterization of Single-Crystal Silicon With Oxide Film

2021 ◽  
Author(s):  
Lianmin Yin ◽  
Yifan Dai ◽  
Hao Hu
Keyword(s):  
Mechanical Properties ◽  
Plastic Deformation ◽  
Oxide Film ◽  
Single Crystal ◽  
Deformation Zone ◽  
Single Crystal Silicon ◽  
Plastic Deformation Zone ◽  
Crystal Silicon ◽  
Ultra Precision

Abstract In order to obtain ultra-smooth surfaces of single-crystal silicon in ultra-precision machining, an accurate study of the deformation mechanism, mechanical properties, and the effect of oxide film under load is required. The mechanical properties of single-crystal silicon and the phase transition after nanoindentation experiments are investigated by nanoindentation and Raman spectroscopy, respectively. It is found that pop-in events appear in the theoretical elastic domain of single-crystal silicon due to the presence of oxide films, which directly leads the single crystal silicon from the elastic deformation zone into the plastic deformation zone. In addition, the mechanical properties of single-crystal silicon are more accurately measured after it has entered the full plastic deformation.

Characterization of recrystallized depth and dopant distribution in laser recovery of grinding damage in single-crystal silicon

2018 ◽  
Vol 82 ◽  
pp. 54-61 ◽  
Author(s):  
Keiichiro Niitsu ◽  
Yu Tayama ◽  
Taketoshi Kato ◽  
Hidenobu Maehara ◽  
Jiwang Yan
Keyword(s):  
Single Crystal ◽  
Single Crystal Silicon ◽  
Dopant Distribution ◽  
Crystal Silicon

Characterization of orientation-dependent etching properties of single-crystal silicon: effects of KOH concentration

1998 ◽  
Vol 64 (1) ◽  
pp. 87-93 ◽  
Author(s):  
Kazuo Sato ◽  
Mitsuhiro Shikida ◽  
Yoshihiro Matsushima ◽  
Takashi Yamashiro ◽  
Kazuo Asaumi ◽  
...  
Keyword(s):  
Single Crystal ◽  
Single Crystal Silicon ◽  
Crystal Silicon

Surface damage and the optical reflectance of single-crystal silicon

1978 ◽  
Vol 17 (21) ◽  
pp. 3477 ◽  
Author(s):  
P. J. Zanzucchi ◽  
M. T. Duffy
Keyword(s):  
Single Crystal ◽  
Single Crystal Silicon ◽  
Surface Damage ◽  
Crystal Silicon ◽  
Optical Reflectance

Mechanical Characterization of Single-Crystal Silicon PV Cells

2013 ◽  
Vol 2 (1) ◽  
pp. 20130003
Author(s):  
R. Gerosa ◽  
M. Mauri ◽  
B. Rivolta ◽  
P. Silva
Keyword(s):  
Single Crystal ◽  
Mechanical Characterization ◽  
Single Crystal Silicon ◽  
Crystal Silicon
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