Electrostatic Actuation to Improve Membrane Mirror Figure

50th AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference ◽

10.2514/6.2009-2152 ◽

2009 ◽

Author(s):

Jason Lindler ◽

Chris Graesser ◽

Eric Flint

Keyword(s):

Electrostatic Actuation

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Prioritization determination of the four folded torsion beam for large rotation angle electrostatic actuation

Information Science and Management Engineering II (Set) ◽

10.2495/isme20140811 ◽

2014 ◽

Author(s):

Qinghua Chen ◽

Yanmei Li ◽

Yingjun Chen

Keyword(s):

Rotation Angle ◽

Electrostatic Actuation ◽

Torsion Beam ◽

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Silicon membrane gyroscope with electrostatic actuation and sensing

10.1117/12.221185 ◽

1995 ◽

Author(s):

David Wood ◽

George Cooper ◽

James S. Burdess ◽

Alun J. Harris ◽

Jane L. Cruickshank

Keyword(s):

Electrostatic Actuation ◽

Silicon Membrane

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Non-linear behaviors of carbon nanotubes under electrostatic actuation based on strain gradient theory

International Journal of Non-Linear Mechanics ◽

10.1016/j.ijnonlinmec.2014.09.006 ◽

2014 ◽

Vol 67 ◽

pp. 236-244 ◽

Author(s):

Mir Masoud Seyyed Fakhrabadi ◽

Abbas Rastgoo ◽

Mohammad Taghi Ahmadian

Keyword(s):

Carbon Nanotubes ◽

Strain Gradient ◽

Electrostatic Actuation ◽

Strain Gradient Theory ◽

Gradient Theory ◽

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Self-assembling GaAs mirror with electrostatic actuation using micro-origami

Physica E Low-dimensional Systems and Nanostructures ◽

10.1016/s1386-9477(04)00189-4 ◽

2004 ◽

Author(s):

T FLEISCHMANN

Keyword(s):

Electrostatic Actuation ◽

Self Assembling

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Characterization of CMOS-MEMS resonator by pulsed mode electrostatic actuation

2010 IEEE International Frequency Control Symposium ◽

10.1109/freq.2010.5556300 ◽

2010 ◽

Author(s):

JL. Munoz-Gamarra ◽

E. Marigo ◽

J. Giner ◽

A. Uranga ◽

F. Torres ◽

...

Keyword(s):

Electrostatic Actuation ◽

Pulsed Mode ◽

Mems Resonator ◽

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Leveraged Bending for Full-Gap Positioning with Electrostatic Actuation

1998 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1998.19 ◽

1998 ◽

Author(s):

E.S. Hung ◽

S.D. Senturia

Keyword(s):

Electrostatic Actuation

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A Robust RF MEMS Variable Capacitor with Piezoelectric and Electrostatic Actuation

2006 IEEE MTT-S International Microwave Symposium Digest ◽

10.1109/mwsym.2006.249903 ◽

2006 ◽

Author(s):

T. Ikehashi ◽

T. Ohguro ◽

E. Ogawa ◽

H. Yamazaki ◽

K. Kojima ◽

...

Keyword(s):

Rf Mems ◽

Electrostatic Actuation ◽

Variable Capacitor

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Self-assembling GaAs mirror with electrostatic actuation using micro-origami

Physica E Low-dimensional Systems and Nanostructures ◽

10.1016/j.physe.2004.04.028 ◽

2004 ◽

Vol 24 (1-2) ◽

pp. 78-81 ◽

Author(s):

T Fleischmann ◽

K Kubota ◽

P.O Vaccaro ◽

T.-S Wang ◽

S Saravanan ◽

...

Keyword(s):

Electrostatic Actuation ◽

Self Assembling

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Design of a monolithic dual-axis electrostatic actuation MEMS microgripper with capacitive position/force sensors

2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013) ◽

10.1109/nano.2013.6720850 ◽

2013 ◽

Author(s):

Yukun Jia ◽

Qingsong Xu

Keyword(s):

Electrostatic Actuation ◽

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Dynamic Pull-In and Switching for Sub-Pull-In Voltage Electrostatic Actuation

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/sensor.2007.4300166 ◽

2007 ◽

Author(s):

G. N. Nielson ◽

R. H. Olsson ◽

G. R. Bogart ◽

P. R. Resnick ◽

O. B. Spahn ◽

...

Keyword(s):

Electrostatic Actuation

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