scholarly journals Leveraged Bending for Full-Gap Positioning with Electrostatic Actuation

1998 ◽  
Author(s):  
E.S. Hung ◽  
S.D. Senturia
Keyword(s):  
Electrostatic Actuation

Silicon membrane gyroscope with electrostatic actuation and sensing

1995 ◽  
Author(s):  
David Wood ◽  
George Cooper ◽  
James S. Burdess ◽  
Alun J. Harris ◽  
Jane L. Cruickshank
Keyword(s):  
Electrostatic Actuation ◽  
Silicon Membrane

Characterization of CMOS-MEMS resonator by pulsed mode electrostatic actuation

2010 ◽  
Author(s):  
JL. Munoz-Gamarra ◽  
E. Marigo ◽  
J. Giner ◽  
A. Uranga ◽  
F. Torres ◽  
...  
Keyword(s):  
Electrostatic Actuation ◽  
Pulsed Mode ◽  
Mems Resonator ◽  
Cmos Mems

Self-assembling GaAs mirror with electrostatic actuation using micro-origami

2004 ◽  
Vol 24 (1-2) ◽  
pp. 78-81 ◽  
Author(s):  
T Fleischmann ◽  
K Kubota ◽  
P.O Vaccaro ◽  
T.-S Wang ◽  
S Saravanan ◽  
...  
Keyword(s):  
Electrostatic Actuation ◽  
Self Assembling
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