scholarly journals Nitrogen Ion Beam Irradiation Effects on Photocatalytic Property of Titanium Oxide Thin Films Prepared by Ion Beam Assisted Deposition Method

Shinku ◽  
2003 ◽  
Vol 46 (5) ◽  
pp. 433-436
Author(s):  
Isao NAKAMURA ◽  
Michiko SASAKI ◽  
Ichiro TAKANO ◽  
Yoshio SAWADA
2007 ◽  
Vol 539-543 ◽  
pp. 3297-3302
Author(s):  
Yoshihisa Watanabe ◽  
Masami Aono ◽  
Nobuaki Kitazawa

Both bulk and thin film amorphous carbon were irradiated using a nitrogen ion beam and changes in surface roughness and composition after ion beam irradiation have been studied. Amorphous carbon thin films were prepared from toluene vapor using plasma enhanced chemical vapor deposition. Ion irradiation was performed at room temperature using a nitrogen ion beam and the ion beam energy was varied from 0.2 to 1.5 keV under the constant ion current density. Surface morphology was observed with atomic force microscopy (AFM). Depth profiles of nitrogen in the irradiated specimens were analyzed by X-ray photoelectron spectroscopy (XPS). AFM observations reveal that after the ion beam irradiation the surface of the bulk amorphous carbon becomes rough, while the surface of the amorphous carbon films becomes smooth. However, the notable difference in the surface roughness is hardly observed between low- and high-energy ion irradiation. From XPS studies, it is found that the nitrogen concentration near the surface increases after the ion irradiation for both bulk and thin films and irradiated nitrogen ions are combined with carbon, resulting in formation of carbon nitride layers. Depth profiles of nitrogen show that for the bulk specimen low-energy ion irradiation is more effective for the carbon nitride formation than high-energy ion irradiation, while for the thin films high-energy ions are implanted more deeply than low-energy ions.


1988 ◽  
Vol 153-155 ◽  
pp. 1447-1448 ◽  
Author(s):  
G.C. Xiong ◽  
F. Weschenfelder ◽  
O. Meyer ◽  
G. Linker ◽  
H.C. Li ◽  
...  

2007 ◽  
Vol 15 (2) ◽  
pp. 113-125 ◽  
Author(s):  
B. Todorović‐Marković ◽  
I. Draganić ◽  
Z. Marković ◽  
Z. Stojanović ◽  
M. Mitrić ◽  
...  

1998 ◽  
Vol 37 (Part 2, No. 10B) ◽  
pp. L1260-L1263 ◽  
Author(s):  
Yun-Sik Jin ◽  
Tetsuya Shibata ◽  
Yoshinobu Matsuda ◽  
Hiroshi Fujiyama

2016 ◽  
Vol 7 (3) ◽  
pp. 172-179 ◽  
Author(s):  
B. A. Gurovich ◽  
K. E. Prikhodko ◽  
M. A. Tarkhov ◽  
A. G. Domantovsky ◽  
D. A. Komarov ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document