Diffusional decomposition of supersaturated solid solutions at grain boundaries

Author(s):  
Vitaly Slezov ◽  
Yuri Boyko ◽  
Jörg Weissmüller
1981 ◽  
Vol 7 ◽  
Author(s):  
J. S. Williams ◽  
K. T. Short

ABSTRACTHigh resolution Rutherford backscattering and channeling techniques have been used to investigate the formation and stability of supersaturated solid solutions of As, Sb, In, Pb, Tℓ and Bi implants in (100) silicon. In all cases nearsubstitutional solid solubilities far exceeding maximum equilibrium solubility limits can be achieved by furnace annealing at temperatures ≤ 600°C. Details of the recrystallisation process indicate that the maximum impurity concentration which can be incorporated onto silicon lattice sites may be controlled by impurity size and associated strain effects at the amorphous-crystal boundary during epitaxial regrowth.


1980 ◽  
Vol 37 (2) ◽  
pp. 170-172 ◽  
Author(s):  
S. U. Campisano ◽  
E. Rimini ◽  
P. Baeri ◽  
G. Foti

2018 ◽  
Vol 28 (31) ◽  
pp. 1801617 ◽  
Author(s):  
Zhong-Zhen Luo ◽  
Xiaomi Zhang ◽  
Xia Hua ◽  
Gangjian Tan ◽  
Trevor P. Bailey ◽  
...  

2020 ◽  
Vol 33 ◽  
pp. 101152 ◽  
Author(s):  
Naoki Takata ◽  
Mulin Liu ◽  
Hirohisa Kodaira ◽  
Asuka Suzuki ◽  
Makoto Kobashi

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