Study of MFM Application in Semiconductor Failure Analysis

2004 ◽  
Author(s):  
Way-Jam Chen ◽  
Lily Shiau ◽  
Ming-Ching Huang ◽  
Chia-Hsing Chao
Keyword(s):  
Magnetic Field ◽  
Failure Analysis ◽  
Magnetic Force Microscopy ◽  
Magnetic Force ◽  
Current Flow ◽  
Force Microscopy ◽  
The Magnetic Field ◽  
A Current

Abstract In this study we have investigated the magnetic field associated with a current flowing in a circuit using Magnetic Force Microscopy (MFM). The technique is able to identify the magnetic field associated with a current flow and has potential for failure analysis.

The Application of Magnetic Force Microscopy for Detection of Subsurface Anomalies in Semiconductor Device Wiring Levels

2013 ◽  
Author(s):  
Phil Kaszuba ◽  
Frank Alwine ◽  
Leon Moszkowicz ◽  
Randy Wells
Keyword(s):  
Magnetic Field ◽  
Magnetic Force Microscopy ◽  
Magnetic Force ◽  
Semiconductor Device ◽  
Field Analysis ◽  
Force Microscopy ◽  
Minimal Sample ◽  
Magnetic Field Analysis ◽  
High Lateral Resolution ◽  
The Magnetic Field

Abstract Subsurface wiring level anomalies in VLSI semiconductor devices are extremely difficult, if not impossible to analyze without de-processing the device to expose suspect wiring. Magnetic Force Microscopy (MFM) is a scanning probe technique that requires minimal sample preparation and has the capability to sense magnetic fields in proximity to thin film conductors with high lateral resolution [1]. In this study, multiple VLSI device conductors were intentionally modified and then the magnetic field around the energized conductors was analyzed using MFM. An overview of the technique and results of the magnetic field analysis are discussed.

Study of Magnetic Field Distribution of Carbon Nanotubes Resulting from Current Pass by Magnetic Force Microscopy

2011 ◽  
Vol 403-408 ◽  
pp. 1103-1105
Author(s):  
Haleh Kangarloo ◽  
Mehrdad Teymurzadeh ◽  
Saeid Rafizadeh
Keyword(s):  
Magnetic Field ◽  
Carbon Nanotubes ◽  
Field Distribution ◽  
Magnetic Force Microscopy ◽  
Magnetic Force ◽  
Magnetic Field Distribution ◽  
Force Microscopy ◽  
Current Path ◽  
Background Magnetic Field ◽  
The Magnetic Field

Recently carbon nanotubes (CNTs) are reported to be able to generate large magnetic field because of their nanometer-size-diameter[2]. The magnetic fields around CNTs current path are investigated by magnetic force microscopy (MFM). Under the consideration of the magnetic properties of magnetically coated tip of MFM, tip heights, current directions, and background magnetic field, etc., the magnetic field distribution are analyzed. The distribution of the magnetic field generated by the CNTs current is found to be asymmetric, and its distribution anomaly is found to be a kind of hysteresis effect of the MFM cantilever materials.

INVESTIGATION OF SURFACE MAGNETIC STRUCTURE IN STEELS OF A SYSTEM Fe–Mn–Al–C BY ATOMIC FORCE MICROSCOPY

1999 ◽  
Vol 06 (01) ◽  
pp. 115-125 ◽  
Author(s):  
G. L. KLIMCHITSKAYA ◽  
R. PRIOLI ◽  
S. I. ZANETTE ◽  
A. O. CARIDE ◽  
O. ACSELRAD ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Magnetic Structure ◽  
Isothermal Aging ◽  
Magnetic Force Microscopy ◽  
Magnetic Field Dependence ◽  
Magnetic Force ◽  
Force Microscopy ◽  
Atomic Force ◽  
Good Imaging ◽  
The Magnetic Field

Magnetic force microscopy (MFM) is used to investigate the surface magnetic structure of steels Fe–28Mn–8.5Al–1C–1.4Si under the different regimes of isothermal aging. A theoretical model for the MFM imaging of such structures is developed. Calculation of van der Waals forces is performed in order to interpret the topography images. The lateral resolution in terms of the magnetic field dependence on the surface coordinates is investigated. Finally, conditions that should be fulfilled for a good imaging of the samples are formulated.

scholarly journals Artifacts in magnetic force microscopy under in-plane applied magnetic field: Magnetic bubble as a case study

2020 ◽  
Vol 500 ◽  
pp. 166296
Author(s):  
Ibrahim Cinar ◽  
Daniel Lacour ◽  
Francois Montaigne ◽  
Vito Puliafito ◽  
Sebastien Petit Watelot ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Applied Magnetic Field ◽  
Magnetic Force Microscopy ◽  
Magnetic Force ◽  
Magnetic Bubble ◽  
Force Microscopy

scholarly journals Round robin comparison on quantitative nanometer scale magnetic field measurements by magnetic force microscopy

2020 ◽  
Vol 511 ◽  
pp. 166947
Author(s):  
Xiukun Hu ◽  
Gaoliang Dai ◽  
Sibylle Sievers ◽  
Alexander Fernández-Scarioni ◽  
Héctor Corte-León ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Magnetic Force Microscopy ◽  
Magnetic Force ◽  
Field Measurements ◽  
Round Robin ◽  
Nanometer Scale ◽  
Force Microscopy ◽  
Magnetic Field Measurements
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