The Application of Magnetic Force Microscopy for Detection of Subsurface Anomalies in Semiconductor Device Wiring Levels

Abstract Subsurface wiring level anomalies in VLSI semiconductor devices are extremely difficult, if not impossible to analyze without de-processing the device to expose suspect wiring. Magnetic Force Microscopy (MFM) is a scanning probe technique that requires minimal sample preparation and has the capability to sense magnetic fields in proximity to thin film conductors with high lateral resolution [1]. In this study, multiple VLSI device conductors were intentionally modified and then the magnetic field around the energized conductors was analyzed using MFM. An overview of the technique and results of the magnetic field analysis are discussed.

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Study of MFM Application in Semiconductor Failure Analysis

ISTFA 2004: Conference Proceedings from the 30th International Symposium for Testing and Failure Analysis ◽

10.31399/asm.cp.istfa2004p0353 ◽

2004 ◽

Author(s):

Way-Jam Chen ◽

Lily Shiau ◽

Ming-Ching Huang ◽

Chia-Hsing Chao

Keyword(s):

Magnetic Field ◽

Failure Analysis ◽

Magnetic Force Microscopy ◽

Magnetic Force ◽

Current Flow ◽

Force Microscopy ◽

The Magnetic Field ◽

A Current

Abstract In this study we have investigated the magnetic field associated with a current flowing in a circuit using Magnetic Force Microscopy (MFM). The technique is able to identify the magnetic field associated with a current flow and has potential for failure analysis.

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A Novel Active Online Electromagnetic Balancing Method—Principle and Structure Analysis

Journal of Vibration and Acoustics ◽

10.1115/1.4005831 ◽

2012 ◽

Vol 134 (3) ◽

Cited By ~ 9

Author(s):

Shilei Ma ◽

Shiyuan Pei ◽

Lin Wang ◽

Hua Xu

Keyword(s):

Magnetic Field ◽

Electromagnetic Force ◽

Magnetic Force ◽

Cutting Tools ◽

Field Analysis ◽

Iron Core ◽

Machining Processes ◽

Magnetic Field Analysis ◽

Precision Finishing ◽

The Magnetic Field

Vibrations caused by the imbalance of a rotor are a frequently encountered problem in machining processes. Especially in high-precision finishing, the workpiece quality is strongly related to the vibration of the machine-tool spindle, which is mainly caused by mass imbalance and cannot be completely eliminated in cutting tools with nonaxisymmetrical structures. An imbalance in centrifugal force is generated by rotor rotation and increases rapidly with rotational speed. A novel active online electromagnetic balancing method based on static magnetic-field analysis is proposed, and an active online electromagnetic balancing device (AOEBD) based on this method was developed under these conditions. The magnetic-field distribution and electromagnetic force generated by the device were analyzed by finite-element modeling. The influence on the electromagnetic force of the misalignment between the rotor and the iron core was investigated. Factors influencing the magnetic force of the device were determined, and reasonable reference values were suggested. The critical eccentricity was also provided. Experiments had been done at last, and the experimental results presented a good performance of this kind of balancing device.

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Study of Magnetic Field Distribution of Carbon Nanotubes Resulting from Current Pass by Magnetic Force Microscopy

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.403-408.1103 ◽

2011 ◽

Vol 403-408 ◽

pp. 1103-1105

Author(s):

Haleh Kangarloo ◽

Mehrdad Teymurzadeh ◽

Saeid Rafizadeh

Keyword(s):

Magnetic Field ◽

Carbon Nanotubes ◽

Field Distribution ◽

Magnetic Force Microscopy ◽

Magnetic Force ◽

Magnetic Field Distribution ◽

Force Microscopy ◽

Current Path ◽

Background Magnetic Field ◽

The Magnetic Field

Recently carbon nanotubes (CNTs) are reported to be able to generate large magnetic field because of their nanometer-size-diameter[2]. The magnetic fields around CNTs current path are investigated by magnetic force microscopy (MFM). Under the consideration of the magnetic properties of magnetically coated tip of MFM, tip heights, current directions, and background magnetic field, etc., the magnetic field distribution are analyzed. The distribution of the magnetic field generated by the CNTs current is found to be asymmetric, and its distribution anomaly is found to be a kind of hysteresis effect of the MFM cantilever materials.

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INVESTIGATION OF SURFACE MAGNETIC STRUCTURE IN STEELS OF A SYSTEM Fe–Mn–Al–C BY ATOMIC FORCE MICROSCOPY

Surface Review and Letters ◽

10.1142/s0218625x99000147 ◽

1999 ◽

Vol 06 (01) ◽

pp. 115-125 ◽

Cited By ~ 5

Author(s):

G. L. KLIMCHITSKAYA ◽

R. PRIOLI ◽

S. I. ZANETTE ◽

A. O. CARIDE ◽

O. ACSELRAD ◽

...

Keyword(s):

Magnetic Field ◽

Magnetic Structure ◽

Isothermal Aging ◽

Magnetic Force Microscopy ◽

Magnetic Field Dependence ◽

Magnetic Force ◽

Force Microscopy ◽

Atomic Force ◽

Good Imaging ◽

The Magnetic Field

Magnetic force microscopy (MFM) is used to investigate the surface magnetic structure of steels Fe–28Mn–8.5Al–1C–1.4Si under the different regimes of isothermal aging. A theoretical model for the MFM imaging of such structures is developed. Calculation of van der Waals forces is performed in order to interpret the topography images. The lateral resolution in terms of the magnetic field dependence on the surface coordinates is investigated. Finally, conditions that should be fulfilled for a good imaging of the samples are formulated.

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