scholarly journals MICROFABRICATED BULK PZT PIEZOELECTRIC DISK TRANSFORMERS

2014 ◽  
Author(s):  
M. Mirzaeimghri ◽  
P. Hareesh ◽  
I. Misri ◽  
D.L. DeVoe
Keyword(s):  
Piezoelectric Disk

The shocked piezoelectric disk as a Maxwell solid

1977 ◽  
Vol 48 (10) ◽  
pp. 4415-4415 ◽  
Author(s):  
George E. Duvall
Keyword(s):  
Piezoelectric Disk

Single-Nozzle Micropumps

2009 ◽  
Author(s):  
X. Y. Huang ◽  
S. S. Wang ◽  
C. Yang
Keyword(s):  
Numerical Simulation ◽  
Flow Direction ◽  
Low Frequency ◽  
Pressure Head ◽  
Acoustic Resonator ◽  
Planar Channel ◽  
Experimental Characterization ◽  
Valveless Micropump ◽  
Dry Adhesives ◽  
Piezoelectric Disk

We demonstrate a new design of valveless micropump with a single nozzle and driven by piezoelectric disk. The nozzle is formed by a planar channel with an acoustic resonator profile, and the pump is fabricated by lamination of layers made of polymethyl-methacrylate (PMMA) and dry adhesives. Both experimental characterization and numerical simulation show that pump works well at low frequency in terms of relatively high pressure head and flowrate. Moreover, the pumping flow direction can be altered by simply adding buffer areas at the inlet and outlet. The pump is suitable for microfluidic integrations.

Design Optimization of BAW Micro-Piezoelectric Disk Gyroscope through Finite Element Method

2013 ◽  
Vol 483 ◽  
pp. 563-566
Author(s):  
Zhong Xing Xu ◽  
Wei Ping Zhang ◽  
Yu Xiang Cheng ◽  
Gong Zhang ◽  
Jian Tang ◽  
...  
Keyword(s):  
Finite Element Method ◽  
Finite Element ◽  
Inertial Sensor ◽  
Bulk Acoustic Wave ◽  
Sense Mode ◽  
Structure Parameter ◽  
Resonant Structure ◽  
Element Analysis ◽  
Fitting Method ◽  
Piezoelectric Disk

Micro-piezoelectric disk gyroscope (MPDG) is a miniaturized inertial sensor that uses a pair of degenerate bulk acoustic wave (BAW) modes to detect the angular velocity. To improve the performance of MPDG, there should be an effective method to design this resonant structure. In this paper, the frequencies of drive and sense mode are obtained when the radius of the MPDG varies from 2.2mm to 3.0mm and the thickness of the MPDG varies from 0.8mm to 1.5mm through finite element analysis (FEM). Using a fitting method, the empirical formulae with an excellent fit are induced to predict the influence of the radius and the thickness of the MPDG on the drive and sense mode frequencies. Based on these empirical formulae, the mode-matched equations are introduced. Moreover, the structure parameter of support pin and electrodes are optimized with FEM. These results can be used to design a piezoelectric disk gyroscope.

The Characteristic Analysis of a Piezoelectric Actuator for Valveless Micropumps

2006 ◽  
Vol 326-328 ◽  
pp. 1511-1514
Author(s):  
Sung Hyuk Lee ◽  
Seok Heo ◽  
Cheol Woong Kim ◽  
Kwang Joon Yoon
Keyword(s):  
Theoretical Model ◽  
Piezoelectric Actuator ◽  
Bonding Layer ◽  
Finite Element Analyses ◽  
Characteristic Analysis ◽  
Design And Optimization ◽  
Simulation Based ◽  
Piezoelectric Disk ◽  
Theoretical Results ◽  
Good Agreement

The behavior of a circular piezoelectric actuator for volumetric micropump has been investigated by using theoretical and finite element analyses. A modified theoretical model was developed to predict the behavior of a piezoelectric actuator induced by the applied voltage. The theoretical results for the diaphragm deflection were in good agreement with the results from numerical simulation. Based on the theoretical analysis, the effects of several important parameters on actuation performance have been investigated. These parameters include the dimensions and mechanical properties of the piezoelectric disk, bonding layer and elastic diaphragm materials. Consequently, it is thought that above theoretical model might be employed as a tool for design and optimization of the piezoelectric actuator for micropump application.

Sign in / Sign up

Export Citation Format

Share Document