Cyclic Scheduling of Sequentially Connected Cluster Tools with a Single I/O Module

IFAC Proceedings Volumes ◽

10.3182/20130619-3-ru-3018.00108 ◽

2013 ◽

Vol 46 (9) ◽

pp. 146-151

Author(s):

Dae-Kyu Kim ◽

Tae-Eog Lee

Keyword(s):

Cyclic Scheduling ◽

Cluster Tools ◽

Connected Cluster

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Non-cyclic scheduling of dual-armed cluster tools for bi-objective minimization of wafer residence time and makespan

2016 IEEE International Conference on Industrial Engineering and Engineering Management (IEEM) ◽

10.1109/ieem.2016.7798031 ◽

2016 ◽

Author(s):

Masaru Sakai ◽

Tatsushi Nishi

Keyword(s):

Residence Time ◽

Cyclic Scheduling ◽

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Cyclic Scheduling Analysis of Single-arm Cluster Tools with Wafer Residency Time Constraint and Chamber Cleaning Operations

2018 IEEE 14th International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2018.8560461 ◽

2018 ◽

Author(s):

FaJun Yang ◽

NaiQi Wu ◽

Rong Su ◽

Yan Qiao

Keyword(s):

Time Constraint ◽

Cyclic Scheduling ◽

Scheduling Analysis ◽

Cluster Tools ◽

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Petri Net-Based Optimal One-Wafer Cyclic Scheduling of Hybrid Multi-Cluster Tools in Wafer Fabrication

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2014.2312192 ◽

2014 ◽

Vol 27 (2) ◽

pp. 192-203 ◽

Author(s):

FaJun Yang ◽

NaiQi Wu ◽

Yan Qiao ◽

MengChu Zhou

Keyword(s):

Petri Net ◽

Cyclic Scheduling ◽

Wafer Fabrication ◽

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Polynomial approach to optimal one-wafer cyclic scheduling of treelike hybrid multi-cluster tools via Petri nets

IEEE/CAA Journal of Automatica Sinica ◽

10.1109/jas.2017.7510772 ◽

2018 ◽

Vol 5 (1) ◽

pp. 270-280 ◽

Author(s):

Fajun Yang ◽

Naiqi Wu ◽

Yan Qiao ◽

Rong Su

Keyword(s):

Cyclic Scheduling ◽

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Cyclic Scheduling of Multi-Cluster Tools Based on Mixed Integer Programming

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2017.2733559 ◽

2017 ◽

Vol 30 (4) ◽

pp. 515-525 ◽

Author(s):

Tianpegn Bao ◽

Huangang Wang

Keyword(s):

Integer Programming ◽

Mixed Integer Programming ◽

Cyclic Scheduling ◽

Mixed Integer ◽

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Petri Net Decomposition Approach to Deadlock-Free and Non-Cyclic Scheduling of Dual-Armed Cluster Tools

IEEE Transactions on Automation Science and Engineering ◽

10.1109/tase.2013.2292572 ◽

2015 ◽

Vol 12 (1) ◽

pp. 281-294 ◽

Author(s):

Tatsushi Nishi ◽

Izuru Matsumoto

Keyword(s):

Petri Net ◽

Cyclic Scheduling ◽

Decomposition Approach ◽

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A Cyclic Scheduling Approach to Single-Arm Cluster Tools With Multiple Wafer Types and Residency Time Constraints

IEEE Transactions on Automation Science and Engineering ◽

10.1109/tase.2018.2878063 ◽

2019 ◽

Vol 16 (3) ◽

pp. 1373-1386 ◽

Author(s):

Jipeng Wang ◽

Chunrong Pan ◽

Hesuan Hu ◽

Liang Li ◽

Yuan Zhou

Keyword(s):

Cyclic Scheduling ◽

Time Constraints ◽

Cluster Tools ◽

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Optimal scheduling for sequentially connected cluster tools with dual-armed robots and a single input and output module

International Journal of Production Research ◽

10.1080/00207543.2016.1243819 ◽

2016 ◽

Vol 55 (11) ◽

pp. 3092-3109 ◽

Author(s):

Dae-Kyu Kim ◽

Hyun-Jung Kim ◽

Tae-Eog Lee

Keyword(s):

Optimal Scheduling ◽

Input And Output ◽

Cluster Tools ◽

Output Module ◽

Connected Cluster ◽

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Cyclic scheduling of multi-cluster tools based on equivalent processing modules

2017 13th IEEE Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2017.8256175 ◽

2017 ◽

Author(s):

Tianpeng Bao ◽

Huangang Wang

Keyword(s):

Cyclic Scheduling ◽

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Optimal one-wafer cyclic scheduling analysis of hybrid multi-cluster tools with one-space buffering module

2014 IEEE International Conference on Robotics and Automation (ICRA) ◽

10.1109/icra.2014.6907330 ◽

2014 ◽

Author(s):

FaJun Yang ◽

Nai Qi Wu ◽

Yan Qiao ◽

Meng Chu Zhou

Keyword(s):

Cyclic Scheduling ◽

Scheduling Analysis ◽

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