Electrical characterization of silicon dioxide and silicon oxynitride thin films
1997 ◽
Vol 36
(Part 2, No. 7B)
◽
pp. L922-L925
◽
Keyword(s):
2011 ◽
Vol E94-C
(2)
◽
pp. 157-163
◽
Keyword(s):
1999 ◽
Vol 28
(3)
◽
pp. 225-227
◽
2019 ◽
Vol 58
(1)
◽
pp. 38-47
◽