This paper investigates methods of improving measurement interpretations in dynamic nanoindentation. In particular, a shift in the system's primary resonance is observed experimentally and investigated through modeling and numerical studies. The result of these investigations is that different sources of nonlinearity, namely, nonlinearities from the tip-sample contact force and the indenter's capacitive transducer, compete to alter the system's primary and secondary resonances. Furthermore, this study implies that the accurate characterization of a material surface requires the implementation of higher fidelity models that include nonlinear expressions, as opposed to linearized versions, for the tip-sample contact force and transducer electrostatic force.
MODELING CAPACITANCE OF CAPACITIVE TRANSDUCER
