Analytic Optimization of Cantilevers for Photoacoustic Gas Sensor with Capacitive Transduction

We propose a new concept of photoacoustic gas sensing based on capacitive transduction which allows full integration while conserving the required characteristics of the sensor. For the sensor’s performance optimization, trial and error method is not feasible due to economic and time constrains. Therefore, we focus on a theoretical optimization of the sensor reinforced by computational methods implemented in a Python programming environment. We present an analytic model to optimize the geometry of a cantilever used as a capacitive transducer in photoacoustic spectroscopy. We describe all the physical parameters which have to be considered for this optimization (photoacoustic force, damping, mechanical susceptibility, capacitive transduction, etc.). These parameters are characterized by opposite trends. They are studied and compared to obtain geometric values for which the signal output and signal-to-noise ratio are maximized.

Development of a Wireless Telemetry Sensor Device to Measure Load and Deformation in Orthopaedic Applications

Due to sensor size and supporting circuitry, in-vivo load and deformation measurements are currently restricted to applications within larger orthopaedic implants. The objective of this study is to repurpose a commercially available low-power, miniature, wireless, telemetric, tire-pressure sensor (FXTH87) to measure load and deformation for future use in orthopaedic and biomedical applications. The capacitive transducer membrane was modified, and compressive deformation was applied to the transducer to determine the sensor signal value and the internal resistive force. The sensor package was embedded within a deformable enclosure to illustrate potential applications of the sensor for monitoring load. To reach the maximum output signal value, sensors required compressive deformation of 350 ± 24 µm. The output signal value of the sensor was an effective predictor of the applied load on a calibrated plastic strain member, over a range of 35 N. The FXTH87 sensor can effectively sense and transmit load-induced deformations. The sensor does not have a limit on loads it can measure, as long as deformation resulting from the applied load does not exceed 350 µm. The proposed device presents a sensitive and precise means to monitor deformation and load within small-scale, deformable enclosures.

Investigation on Stray-Capacitance Influences of Coaxial Cables in Capacitive Transducers for a Space Inertial Sensor

Ultra-sensitive inertial sensors are one of the key components in satellite Earth’s gravity field recovery missions and space gravitational wave detection missions. Low-noise capacitive position transducers are crucial to these missions to achieve the scientific goal. However, in actual engineering applications, the sensor head and electronics unit usually place separately in the satellite platform where a connecting cable is needed. In this paper, we focus on the stray-capacitance influences of coaxial cables which are used to connect the mechanical core and the electronics. Specially, for the capacitive transducer with a differential transformer bridge structure usually used in high-precision space inertial sensors, a connecting method of a coaxial cable between the transformer’s secondary winding and front-end circuit’s preamplifier is proposed to transmit the AC modulated analog voltage signal. The measurement and noise models including the stray-capacitance of the coaxial cable under this configuration is analyzed. A prototype system is set up to investigate the influences of the cables experimentally. Three different types and lengths of coaxial cables are chosen in our experiments to compare their performances. The analysis shows that the stray-capacitance will alter the circuit’s resonant frequency which could be adjusted by additional tuning capacitance, then under the optimal resonant condition, the output voltage noises of the preamplifier are measured and the sensitivity coefficients are also calibrated. Meanwhile, the stray-capacitance of the cables is estimated. Finally, the experimental results show that the noise level of this circuit with the selected cables could all achieve 1–2 × 10−7 pF/Hz1/2 at 0.1 Hz.

Design of a Carrier Wave for Capacitive Transducer with Large Dynamic Range

Capacitive transducers are widely used in fundamental physics experiments, seismology, Earth or planetary observations, and space scientific and technical applications because of their high precision, simple structure, and compatibility with various measurements. However, in real applications, there is a trade-off between their resolution and dynamic range. Therefore, this paper is aimed at enlarging the dynamic range while ensuring high resolution. In this paper, a noise analysis of a capacitive transducer is presented, which shows that the amplitude noise of the carrier wave is the main limiting factor. Hence, a new method of generating a carrier wave with lower-amplitude noise is proposed in the paper. Based on the experimental verification, it is found that the carrier wave produced through the new method performed significantly better than the typical digital carrier wave when they were compared in the same sensing circuit. With the carrier wave produced through the new method, the dynamic range of the capacitive transducer can reach 120.7 dB, which is 18.3 dB greater than for the typical direct digital synthesis (DDS) method. In addition, the resolution of the carrier wave is mainly limited by the voltage reference components.

Passive Wireless Pressure Sensing for Gastric Manometry

We describe a wireless microsystem for gastrointestinal manometry that couples a microfabricated capacitive transducer to a dual-axis inductor, forming a resonant inductor-capacitor (LC) sensor within an ingestible 3D printed biocompatible capsule measuring ø 12 mm × 24 mm. An inductively coupled external telemetry unit wirelessly monitors the pressure dependent resonant frequency of the LC sensor, eliminating the need for integrated power sources within the ingested capsule. In vitro tests in saline show pressure response of −0.6 kHz/mmHg, interrogation distance up to 6 cm, and resolution up to 0.8 mmHg. In vivo functionality is validated with gastrointestinal pressure monitoring in a canine beagle over a 26-hour period.

High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout

Commercially available gravimeters and seismometers can be used for measuring Earth’s acceleration at resolution levels in the order of $${\mathrm{ng}}/\sqrt {\mathrm{Hz}}$$ ng ∕ Hz (where g represents earth’s gravity) but they are typically high-cost and bulky. In this work the design of a bulk micromachined MEMS device exploiting non-linear buckling behaviour is described, aiming for $${\mathrm{ng}}/\sqrt {\mathrm{Hz}}$$ ng ∕ Hz resolution by maximising mechanical and capacitive sensitivity. High mechanical sensitivity is obtained through low structural stiffness. Near-zero stiffness is achieved through geometric design and large deformation into a region where the mechanism is statically balanced or neutrally stable. Moreover, the device has an integrated capacitive comb transducer and makes use of a high-resolution impedance readout ASIC. The sensitivity from displacement to a change in capacitance was maximised within the design and process boundaries given, by making use of a trench isolation technique and exploiting the large-displacement behaviour of the device. The measurement results demonstrate that the resonance frequency can be tuned from 8.7 Hz–18.7 Hz, depending on the process parameters and the tilt of the device. In this system, which combines an integrated capacitive transducer with a sensitivity of 2.55 aF/nm and an impedance readout chip, the theoretically achievable system resolution equals 17.02 $${\mathrm{ng}}/\sqrt {\mathrm{Hz}}$$ ng ∕ Hz . The small size of the device and the use of integrated readout electronics allow for a wide range of practical applications for data collection aimed at the internet of things.

Optimized Design of CMUT with Hexagonal Membranes

A Capacitive Micro-machined Ultrasonic Transducer (CMUT) with hexagonal membrane is constructed to work as a transmitter and compared to a CMUT with circular membrane. In this paper, three desirable combination of circular and hexagon are analyzed to select the dimensions for hexagonal shaped CMUT. Capacitive Micro-machined Ultrasonic Transducer (CMUT) is a micro constructed transducer used both as transmitter for generating ultrasonic waves and as receiver to modulate the electrical capacitance of the capacitive transducer. It can be fabricated with many geometries especially circular, square, rectangular, and hexagon. Circular CMUTs offers optimum performance in terms of deflection with DC, deflection of biased membrane with AC bias, resonant frequency, capacitance and deflection along frequency but for array formation the wafer area is wasted. A CMUT with hexagonal membrane gives an ultrasonic signal of constant amplitude with less deflection of membrane within the cavity and the outside environment. Stationary analysis is carried out with electro-mechanics for discussing the capacitance change of CMUT. The collapse or pull in voltage of hexagon CMUT is found to be high and increases the bandwidth of CMUT. The absolute percent difference of resonant frequency is observed to be 2.3 % with dimensions selected from the COH configuration of the CMUT