scholarly journals Prototype MEMS Capacitive Pressure Sensor Design and Manufacturing

2013 ◽  
Vol 57 (1) ◽  
pp. 3 ◽  
Author(s):  
Tamás Kárpáti ◽  
Andrea Edit Pap ◽  
Sándor Kulinyi
Keyword(s):  
Pressure Sensor ◽  
Capacitive Pressure Sensor ◽  
Sensor Design ◽  
Design And Manufacturing

Differential capacitive pressure sensor design based on standard CMOS

2017 ◽  
Vol 53 (11) ◽  
pp. 737-739 ◽  
Author(s):  
E. Unigarro ◽  
J.C. Bohórquez ◽  
A. Achury ◽  
F. Ramirez ◽  
J. Sacristán ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Capacitive Pressure Sensor ◽  
Sensor Design

scholarly journals Implementation of MEMS Capacitive Pressure Sensor Design using COMSOL Software

2019 ◽  
Vol 8 (2S8) ◽  
pp. 967-972 ◽  
Keyword(s):  
Blood Pressure ◽  
Blood Vessel ◽  
Blood Vessels ◽  
Real Time ◽  
Pressure Sensor ◽  
Vital Signs ◽  
Capacitive Pressure Sensor ◽  
Sensor Design

This paper is based on the research of emerging implantable medical instrumentations. An implantable Blood Pressure (BP) monitoring Microsystems is very essential to monitor patient’s BP continuously and gives warning when they are extreme and interim levels. The instrument should be accurately measure the both systolic and diastolic values. Based on the readings the BP is categorized in to four (Ideal BP: diastolic=120 and systolic=80, low BP 90 and 60, Pre-hyper values are 140 and 90 and hyper tension values are 190 and 100). BP consists one of the principle vital signs referring to the force entered by circulating blood on the walls of blood vessels. The system consists of instrumented elastic cuff, wrapped around a blood vessel, to sense real time blood pressure. In this paper, a MEMS based capacitor pressure sensor is to be designed with less than the dimensions of 0.4x0.5x0.4mm 3 , and with the approximate capacitance of less than 2pF and 1fF per mmHg.

INNOVATIVE FOOT PRESSURE SENSOR DESIGN FOR HUMANOID ROBOTS

2019 ◽  
Author(s):  
FRANCISCO ARTHUR BONFIM AZEVEDO ◽  
Daniela Vacarini de Faria ◽  
Marcos Maximo ◽  
Mauricio Donadon
Keyword(s):  
Pressure Sensor ◽  
Humanoid Robots ◽  
Sensor Design ◽  
Foot Pressure

Development of circuit solution and design of capacitive pressure sensor array for applied robotics

2020 ◽  
Vol 8 (4) ◽  
pp. 296-307
Author(s):  
Konstantin Krestovnikov ◽  
Aleksei Erashov ◽  
Аleksandr Bykov
Keyword(s):  
Pressure Sensor ◽  
Output Signal ◽  
Sensor Array ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Fine Tuning ◽  
Capacitive Pressure Sensor ◽  
Cell Parameters ◽  
Linear Pattern ◽  
Sensor Structure

This paper presents development of pressure sensor array with capacitance-type unit sensors, with scalable number of cells. Different assemblies of unit pressure sensors and their arrays were considered, their characteristics and fabrication methods were investigated. The structure of primary pressure transducer (PPT) array was presented; its operating principle of array was illustrated, calculated reference ratios were derived. The interface circuit, allowing to transform the changes in the primary transducer capacitance into voltage level variations, was proposed. A prototype sensor was implemented; the dependency of output signal power from the applied force was empirically obtained. In the range under 30 N it exhibited a linear pattern. The sensitivity of the array cells to the applied pressure is in the range 134.56..160.35. The measured drift of the output signals from the array cells after 10,000 loading cycles was 1.39%. For developed prototype of the pressure sensor array, based on the experimental data, the average signal-to-noise ratio over the cells was calculated, and equaled 63.47 dB. The proposed prototype was fabricated of easily available materials. It is relatively inexpensive and requires no fine-tuning of each individual cell. Capacitance-type operation type, compared to piezoresistive one, ensures greater stability of the output signal. The scalability and adjustability of cell parameters are achieved with layered sensor structure. The pressure sensor array, presented in this paper, can be utilized in various robotic systems.

Flexible M-Tooth Hybrid Micro-Structure Based Capacitive Pressure Sensor with High Sensitivity and Wide Sensing Range

2021 ◽  
pp. 1-1
Author(s):  
Valliammai Palaniappan ◽  
Masoud Panahi ◽  
Dinesh Maddipatla ◽  
Xingzhe Zhang ◽  
Simin Masihi ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
High Sensitivity ◽  
Capacitive Pressure Sensor ◽  
Micro Structure ◽  
Sensing Range
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