scholarly journals SUBSTRATE MATERIAL INFLUENCE ON THE THERMOCHEMICAL LASER WRITING OF DIFFRACTIVE STRUCTURES ON ZIRCONIUM FILMS

2020 ◽  
Vol 8 (1) ◽  
pp. 153-159
Author(s):  
Roman I. Kuts ◽  
Victor P. Korolkov ◽  
Ruslan V. Shimansky ◽  
Vladimir N. N. Khomutov ◽  
Anatoly I. Malyshev
Keyword(s):  
Quartz Substrate ◽  
Softening Temperature ◽  
Substrate Material ◽  
Fused Silica ◽  
Direct Laser Writing ◽  
Laser Writing ◽  
Glass Substrates ◽  
Direct Laser ◽  
Quasiperiodic Structures ◽  
Diffractive Structures

The paper is devoted to comparing the features of the formation of oxide microstructures during direct laser writing on thin (100 nm) zirconium films deposited on glass and fused silica substrates to identify the most stable and predicted writing modes. The presence of self-induced oxide quasiperiodic structures was detected during continuous laser writing on zirconium films deposited on glass substrates. The effect of the formation of nanostructures, which are parallel cracks in the oxide layer and have a period equal to the recording step (250-500 nm), formed during the writing process on zirconium films deposited on a quartz substrate is revealed. The advantages of fused silica as a substrate material for direct laser writing on zirconium films are shown due to the higher softening temperature of fused silica compared to glass.

scholarly journals STUDY OF FILMS OF TRANSITION METALS AS MATERIALS FOR LASER NANOSTRUCTURING

2021 ◽  
Vol 8 ◽  
pp. 241-247
Author(s):  
Roman I. Kuts ◽  
Victor P. Korolkov ◽  
Vladimir N. Khomutov ◽  
Anatoly I. Malyshev ◽  
Sergey L. Mikerin
Keyword(s):  
Thin Films ◽  
Transition Metals ◽  
Fused Silica ◽  
Point Of View ◽  
Direct Laser Writing ◽  
Periodic Nanostructures ◽  
Laser Writing ◽  
Oxide Nanostructures ◽  
Direct Laser ◽  
Silica Substrates

This paper presents the results of a study of direct laser writing on thin films of transition metals (Hf, Ti, Zr, Ta, V). The films were deposited on fused silica substrates. A comparison of laser writing on the indicated films is carried out from the point of view of the presence of contour writing. As it was proved earlier, when writing on zirconium films, contour writing leads to formation of periodic nanostructures with a period equal to the writing step (250-500 nm). Materials were identified that are promising from the point of view of writing oxide nanostructures for the further formation of the diffraction phase microrelief of DOEs.

Microstructuring of optical surfaces: Technology and device for direct laser writing of diffractive structures

2010 ◽  
Vol 46 (2) ◽  
pp. 171-180 ◽  
Author(s):  
A. G. Poleshchuk ◽  
A. A. Kutanov ◽  
V. P. Bessmeltsev ◽  
V. P. Korolkov ◽  
R. V. Shimanskii ◽  
...  
Keyword(s):  
Direct Laser Writing ◽  
Laser Writing ◽  
Optical Surfaces ◽  
Direct Laser ◽  
Diffractive Structures

Increasing the spatial resolution of direct laser writing of diffractive structures on thin films of titanium group metals

2019 ◽  
Author(s):  
Victor P. Korolkov ◽  
Andrey G. Sedukhin ◽  
Dmitry A. Belousov ◽  
Ruslan V. Shimansky ◽  
Vladimir N. Khomutov ◽  
...  
Keyword(s):  
Thin Films ◽  
Spatial Resolution ◽  
Direct Laser Writing ◽  
Laser Writing ◽  
Direct Laser ◽  
Diffractive Structures

scholarly journals OPTIMIZATION OF OPTICAL CHANNEL OF SCANNING LASER NANOLITHOGRAPHER FOR WRITING ON PHOTO- AND THERMO-SENSITIVE MATERIALS

2019 ◽  
Vol 8 ◽  
pp. 28-33
Author(s):  
Victor Korolkov ◽  
Andrey Sedukhin ◽  
Anton Kachkin ◽  
Andrey Elisafenko
Keyword(s):  
Thin Film ◽  
Optical Channel ◽  
Direct Laser Writing ◽  
Transparent Glass ◽  
Glass Substrates ◽  
Diffractive Structure ◽  
Direct Laser ◽  
On Line ◽  
Diffractive Structures

New units and modified constructional components of an optical channel of a scanning X-Y laser nanolithographer are described. The nanolithographer serves for direct laser writing of subwavelength diffractive structures on thin-film photo- and thermo-sensitive materials deposited on planar transparent glass substrates. Significant changes were introduced into a unit of spatial frequency filtration, expansion and collimation of the laser beam of a writing laser. A new unit for on-line in-situ inspection of written diffractive structure is a unit of backward incoherent illumination.

scholarly journals Controlled formation of metallic tellurium nanocrystals in tellurite glasses using femtosecond direct laser writing

2021 ◽  
Author(s):  
Renato Grigolon Capelo ◽  
Juliana M.P. Almeida ◽  
Douglas Faza Franco ◽  
Gael Yves Poirier ◽  
Cleber Renato Mendonça ◽  
...  
Keyword(s):  
Tellurite Glasses ◽  
Direct Laser Writing ◽  
Laser Writing ◽  
Direct Laser

scholarly journals Femtosecond direct laser writing of gold nanostructures by ionic liquid assisted multiphoton photoreduction

2013 ◽  
Vol 3 (10) ◽  
pp. 1660 ◽  
Author(s):  
Wei-Er Lu ◽  
Yong-Liang Zhang ◽  
Mei-Ling Zheng ◽  
Yan-Peng Jia ◽  
Jie Liu ◽  
...  
Keyword(s):  
Ionic Liquid ◽  
Gold Nanostructures ◽  
Direct Laser Writing ◽  
Laser Writing ◽  
Direct Laser
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