scholarly journals The Microfabricated Alkali Vapor Cell with High Hermeticity for Chip-Scale Atomic Clock

2022 ◽  
Vol 12 (1) ◽  
pp. 436
Author(s):  
Shuo Jia ◽  
Zhiyuan Jiang ◽  
Binbin Jiao ◽  
Xiaochi Liu ◽  
Yijie Pan ◽  
...  

Herein, a microfabricated millimeter-level vapor alkali cell with a high hermeticity is fabricated through a wet etching and single-chip anodic bonding process. The vapor cell, containing Rb and N2, was investigated in a coherent population trapping (CPT) setup for the application of a chip-scale atomic clock (CSAC). The contrast of CPT resonance is up to 1.1% within the only 1 mm length of light interacting with atom. The effects of some critical external parameters on the CPT resonance, such as laser intensity, cell temperature, and buffer gas pressure, are thoroughly studied and optimized. The improved microfabricated vapor cell also exhibited great potential for other chip-scale atomic devices.

2019 ◽  
Vol 56 (12) ◽  
pp. 120201
Author(s):  
李云超 Yunchao Li ◽  
胡旭文 Xuwen Hu ◽  
张璐 Lu Zhang ◽  
刘召军 Zhaojun Liu ◽  
张开放 Kaifang Zhang ◽  
...  

2021 ◽  
Vol 2103 (1) ◽  
pp. 012188
Author(s):  
A Kazakin ◽  
R Kleimanov ◽  
I Komarevtsev ◽  
A Kondrateva ◽  
Y Enns ◽  
...  

Abstract The technology of MEMS atomic cells containing rubidium or caesium vapors in an atmosphere of neon buffer gas has been developed. Two-chamber silicon cells containing an optical cavity, shallow filtration channels and a technical container for a solid-state alkali source have been implemented in a single-step process of anisotropic wet chemical etching. To prevent significant undercutting of the filtration channels during etching of the through silicon cavities, the shapes of the compensating elements at the convex corners of the silicon nitride mask have been calculated and the composition of the silicon etchant has been experimentally found. The sealing of the cells has been carried out by silicon-glass anodic bonding at a temperature of 250 °C. For this purpose the LK5 glass which has an increased ionic conductivity in comparison with the conventional glass Borofloat 33 was used. The best microfabricated cells allowed us to obtain estimates of the relative instability of the coherent population trapping resonance frequency at the level of 5 · 10-11 at 1 s.


2018 ◽  
Vol 112 (24) ◽  
pp. 244102 ◽  
Author(s):  
M. Abdel Hafiz ◽  
G. Coget ◽  
M. Petersen ◽  
C. E. Calosso ◽  
S. Guérandel ◽  
...  

2018 ◽  
Vol 9 (6) ◽  
Author(s):  
Moustafa Abdel Hafiz ◽  
Grégoire Coget ◽  
Michael Petersen ◽  
Cyrus Rocher ◽  
Stéphane Guérandel ◽  
...  

2013 ◽  
Vol 22 (4) ◽  
pp. 043201 ◽  
Author(s):  
Zhi Liu ◽  
Jie-Ying Wang ◽  
Wen-Ting Diao ◽  
Jun He ◽  
Jun-Min Wang

2016 ◽  
Vol 41 ◽  
pp. 1660138 ◽  
Author(s):  
S. V. Ermak ◽  
V. V. Semenov ◽  
M. V. Petrenko ◽  
E. N. Pyatyshev

The characteristics of coherent population trapping (CPT) signal were investigated in small-size glass vapor cells containing [Formula: see text]Rb and Ne buffer gas with narrow line-width laser pumping on D2 line. The parameters of CPT signals were measured using small-size vapor cells with Ne buffer gas pressure in the range of 200–400 Torr, cell temperature in the range of 65–120 [Formula: see text]C and the values of laser pumping power of 30–400 [Formula: see text]W/cm2. Optimal conditions, under which the minimal value of short-term instability of resonance line is achieved, were obtained in experiments. Orientation frequency shifts of CPT resonance using glass [Formula: see text]Rb vapor cells containing buffer gas and anti-relaxation coating were compared. CPT signals using vapor cells based on integrated technologies containing [Formula: see text]Rb in atmosphere of Ne were also investigated. The CPT signals with typical line widths of 2–3 kHz and signal-to-noise ratio of 1500 in 1 Hz bandwidth are observed, which allows one to provide relative frequency instability of 10[Formula: see text] at 100 s.


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