The present work deals with the development of a hybrid manipulator of 5 degrees of freedom for milling moulds for microlenses. The manipulator is based on a XY stage under a 3PRS compliant parallel mechanism. The mechanism takes advantage of the compliant joints to achieve higher repetitiveness, smoother motion and a higher bandwidth, due to the high precision demanded from the process, under 0.1 micrometers. This work is focused on the kinematics of the compliant stage of the hybrid manipulator. First, an analysis of the workspace required for the milling of a single mould has been performed, calculating the displacements required in X, Y, Z axis as well as two relative rotations between the tool and the workpiece from a programmed toolpath. Then, the 3PRS compliant parallel mechanism has been designed using FEM with the objective of being stiff enough to support the cutting forces from the micromilling, but flexible enough in the revolution and spherical compliant joints to provide the displacements needed. Finally, a prototype of the 3PRS compliant mechanism has been built, implementing a motion controller to perform translations in Z direction and two rotations. The resulting displacements in the end effector and the actuated joints have been measured and compared with the FEM calculations and with the rigid body kinematics of the 3PRS.
Systematic Design Method and Experimental Validation of a 2-DOF Compliant Parallel Mechanism with Excellent Input and Output Decoupling Performances
