scholarly journals Grain Size and Phase Transformation Behavior of TiNi Shape-Memory-Alloy Thin Film under Different Deposition Conditions

Materials ◽  
2020 ◽  
Vol 13 (14) ◽  
pp. 3229
Author(s):  
Joohyeon Bae ◽  
Hyunsuk Lee ◽  
Duckhyeon Seo ◽  
Sangdu Yun ◽  
Jeonghyeon Yang ◽  
...  

TiNi shape-memory-alloy thin films can be used as small high-speed actuators or sensors because they exhibit a rapid response rate. In recent years, the transformation temperature of these films, manufactured via a magnetron sputtering method, was found to be lower than that of the bulk alloys owing to the small size of the grain. In this study, deposition conditions (growth rate, film thickness, and substrate temperature) affecting the grain size of thin films were investigated. The grain size of the thin film alloys was found to be most responsive to the substrate temperature.

2008 ◽  
Vol 62 (17-18) ◽  
pp. 2791-2794 ◽  
Author(s):  
T. Shahrabi ◽  
S. Sanjabi ◽  
E. Saebnoori ◽  
Z.H. Barber

2003 ◽  
Vol 2003.41 (0) ◽  
pp. 45-46
Author(s):  
Tomotaka HONDA ◽  
Hitoshi TAKAGI ◽  
Hiroaki MISAWA ◽  
Toyokazu KUBO

2003 ◽  
Vol 2003.1 (0) ◽  
pp. 261-262
Author(s):  
Hitoshi TAKAGI ◽  
Tomotaka HONDA ◽  
Hiroaki MISAWA

2002 ◽  
Vol 17 (2) ◽  
pp. 279-283 ◽  
Author(s):  
X. Y. Chen ◽  
Y. F. Lu ◽  
Z. M. Ren ◽  
S. Zhu

Thin films of TiNi shape memory alloy have been prepared by pulsed-laser deposition at different substrate temperatures. The stoichiometry and crystallinity of the deposited films as functions of the substrate temperature were investigated. The deposition rate, surface morphology, crystallization temperature, and phase transformation behavior of the films were studied. It was found that both the substrate temperature and the laser fluence play important roles in the composition control and crystallization of the films. The deposition rate is of the order of 10−2 nm/pulse. The Ni content ranges from 46.7 to 52.0 at.%. The crystallization temperature of the amorphous Ti–51.5 at.% Ni films is around 460 °C. The activation energy of the crystallization process was determined by Kissinger's method to be 301 kJ/mol. The martensitic transformation temperature of the annealed Ti–51.5 at.% Ni film was determined to be −20.8 °C.


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