scholarly journals A Surface Micromachined CMOS MEMS Humidity Sensor

Micromachines ◽  
2015 ◽  
Vol 6 (10) ◽  
pp. 1569-1576 ◽  
Author(s):  
Jian-Qiu Huang ◽  
Fei Li ◽  
Min Zhao ◽  
Kai Wang
Keyword(s):  
Humidity Sensor ◽  
Cmos Mems

scholarly journals A CMOS MEMS Humidity Sensor Enhanced by a Capacitive Coupling Structure

Micromachines ◽  
2016 ◽  
Vol 7 (5) ◽  
pp. 74 ◽  
Author(s):  
Jian-Qiu Huang ◽  
Baoye Li ◽  
Wenhao Chen
Keyword(s):  
Humidity Sensor ◽  
Capacitive Coupling ◽  
Coupling Structure ◽  
Cmos Mems

scholarly journals Fabrication and Characterization of a CMOS-MEMS Humidity Sensor

Sensors ◽  
2015 ◽  
Vol 15 (7) ◽  
pp. 16674-16687 ◽  
Author(s):  
John-Ojur Dennis ◽  
Abdelaziz-Yousif Ahmed ◽  
Mohd-Haris Khir
Keyword(s):  
Humidity Sensor ◽  
Cmos Mems ◽  
Fabrication And Characterization

Development of a CMOS-MEMS RF-aerogel-based capacitive humidity sensor

2014 ◽  
Author(s):  
Vincent P. J. Chung ◽  
Jack K.-C. Liang ◽  
Chao-Lin Cheng ◽  
Ming-Chuen Yip ◽  
Weileun Fang
Keyword(s):  
Humidity Sensor ◽  
Cmos Mems ◽  
Capacitive Humidity Sensor

A nanowire WO3 humidity sensor integrated with micro-heater and inverting amplifier circuit on chip manufactured using CMOS-MEMS technique

2007 ◽  
Vol 123 (2) ◽  
pp. 896-901 ◽  
Author(s):  
Ching-Liang Dai ◽  
Mao-Chen Liu ◽  
Fu-Song Chen ◽  
Chyan-Chyi Wu ◽  
Ming-Wei Chang
Keyword(s):  
Humidity Sensor ◽  
Amplifier Circuit ◽  
Cmos Mems ◽  
On Chip

System in Package of Integrated Humidity Sensor Using CMOS-MEMS Technology

2015 ◽  
Vol 15 (10) ◽  
pp. 7503-7507 ◽  
Author(s):  
Sung Pil Lee
Keyword(s):  
Relative Humidity ◽  
Wireless Communication ◽  
Sensor Network ◽  
Communication System ◽  
Temperature Sensor ◽  
Humidity Sensor ◽  
Wireless Communication System ◽  
Mems Technology ◽  
Cmos Mems ◽  
Mems Process

Temperature/humidity microchips with micropump were fabricated using a CMOS-MEMS process and combined with ZigBee modules to implement a sensor system in package (SIP) for a ubiquitous sensor network (USN) and/or a wireless communication system. The current of a diode temperature sensor to temperature and a normalized current of FET humidity sensor to relative humidity showed linear characteristics, respectively, and the use of the micropump has enabled a faster response. A wireless reception module using the same protocol as that in transmission systems processed the received data within 10 m and showed temperature and humidity values in the display.

Resorcinol–formaldehyde aerogels for CMOS-MEMS capacitive humidity sensor

2015 ◽  
Vol 214 ◽  
pp. 181-188 ◽  
Author(s):  
Vincent P.J. Chung ◽  
Ming-Chuen Yip ◽  
Weileun Fang
Keyword(s):  
Humidity Sensor ◽  
Resorcinol Formaldehyde ◽  
Cmos Mems ◽  
Capacitive Humidity Sensor
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