A Review of the Capacitive MEMS for Seismology

MEMS (Micro Electro-Mechanical Systems) sensors enable a vast range of applications: among others, the use of MEMS accelerometers for seismology related applications has been emerging considerably in the last decade. In this paper, we provide a comprehensive review of the capacitive MEMS accelerometers: from the physical functioning principles, to the details of the technical precautions, and to the manufacturing procedures. We introduce the applications within seismology and earth sciences related disciplines, namely: earthquake observation and seismological studies, seismic surveying and imaging, structural health monitoring of buildings. Moreover, we describe how the use of the miniaturized technologies is revolutionizing these fields and we present some cutting edge applications that, in the very last years, are taking advantage from the use of MEMS sensors, such as rotational seismology and gravity measurements. In a ten-year outlook, the capability of MEMS sensors will certainly improve through the optimization of existing technologies, the development of new materials, and the implementation of innovative production processes. In particular, the next generation of MEMS seismometers could be capable of reaching a noise floor under the lower seismic noise (few tenths of ng/ H z ) and expanding the bandwidth towards lower frequencies (∼0.01 Hz).

Download Full-text

Capacitive MEMS accelerometers for measuring high-g accelerations

Optoelectronics Instrumentation and Data Processing ◽

10.3103/s8756699017030141 ◽

2017 ◽

Vol 53 (3) ◽

pp. 294-302 ◽

Cited By ~ 1

Author(s):

I. L. Baginsky ◽

E. G. Kostsov

Keyword(s):

Mems Accelerometers ◽

Capacitive Mems

Download Full-text

A self-developed indoor three-dimensional pedestrian localization platform based on MEMS sensors

Sensor Review ◽

10.1108/sr-07-2014-682 ◽

2015 ◽

Vol 35 (2) ◽

pp. 157-167 ◽

Cited By ~ 7

Author(s):

Shengbo Sang ◽

Ruiyong Zhai ◽

Wendong Zhang ◽

Qirui Sun ◽

Zhaoying Zhou

Keyword(s):

Low Cost ◽

Angular Rate ◽

Three Dimensional ◽

Dead Reckoning ◽

Rate Data ◽

Mems Sensors ◽

Micro Electro Mechanical Systems ◽

Content Type ◽

Position Errors ◽

Low Performance

Purpose – This study aims to design a new low-cost localization platform for estimating the location and orientation of a pedestrian in a building. The micro-electro-mechanical systems (MEMS) sensor error compensation and the algorithm were improved to realize the localization and altitude accuracy. Design/methodology/approach – The platform hardware was designed with common low-performance and inexpensive MEMS sensors, and with a barometric altimeter employed to augment altitude measurement. The inertial navigation system (INS) – extended Kalman filter (EKF) – zero-velocity updating (ZUPT) (INS-EKF-ZUPT [IEZ])-extended methods and pedestrian dead reckoning (PDR) (IEZ + PDR) algorithm were modified and improved with altitude determined by acceleration integration height and pressure altitude. The “AND” logic with acceleration and angular rate data were presented to update the stance phases. Findings – The new platform was tested in real three-dimensional (3D) in-building scenarios, achieved with position errors below 0.5 m for 50-m-long route in corridor and below 0.1 m on stairs. The algorithm is robust enough for both the walking motion and the fast dynamic motion. Originality/value – The paper presents a new self-developed, integrated platform. The IEZ-extended methods, the modified PDR (IEZ + PDR) algorithm and “AND” logic with acceleration and angular rate data can improve the high localization and altitude accuracy. It is a great support for the increasing 3D location demand in indoor cases for universal application with ordinary sensors.

Download Full-text

Identification of Vibration Parameters of Mechanical System Utilizing Low-Cost MEMS Accelerometers

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.894.1 ◽

2019 ◽

Vol 894 ◽

pp. 1-8

Author(s):

Khanh Duong Quang ◽

Huong Vuong Thi ◽

Anh Luu Van

Keyword(s):

High Speed ◽

Low Cost ◽

Damping Ratio ◽

Vibration Reduction ◽

Mechanical Systems ◽

Micro Electro Mechanical Systems ◽

Mems Accelerometer ◽

System Parameters ◽

Mems Accelerometers ◽

Vibration Parameters

Multi-axial mechanical systems commonly encounter the problem of vibration while attempting to drive machining systems at high speed. Many effective methods based on feed-forward and feedback control have been proposed and applied for vibration reduction. In order to design controllers all methods require the exact knowledge of system parameters: vibration frequency and damping ratio. In recent years, low-cost Micro Electro Mechanical Systems (MEMS) accelerometers have been used for many applications in industry. This paper presents the advantage of low cost MEMS accelerometer to identify vibration parameters of mechanical systems in comparison to conventional expensive devices.

Download Full-text