scholarly journals Development of the Heterodyne Laser Encoder System for the X–Y Positioning Stage

Sensors ◽  
2021 ◽  
Vol 21 (17) ◽  
pp. 5775
Author(s):  
Chung-Ping Chang ◽  
Tsung-Chun Tu ◽  
Siang-Ruei Huang ◽  
Yung-Cheng Wang ◽  
Syuan-Cheng Chang

This investigation develops a laser encoder system based on a heterodyne laser interferometer. For eliminating geometric errors, the optical structure of the proposed encoder system was carried out with the internal zero-point method. The designed structure can eliminate the geometric errors, including positioning error, straightness error, squareness error, and Abbe error of the positioning stage. The signal processing system is composed of commercial integrated circuits (ICs). The signal type of the proposed encoding system is a differential signal that is compatible with most motion control systems. The proposed encoder system is embedded in a two-dimensional positioning stage. By the experimental results of the positioning test in the measuring range of 27 mm × 27 mm, with a resolution of 15.8 nm, the maximum values of the positioning error and standard deviation are 12.64 nm and 126.4 nm, respectively, in the positioning experiments. The result shows that the proposed encoder system can fit the positioning requirements of the optoelectronic and semiconductor industries.

2021 ◽  
Author(s):  
samar elsayed elbialy ◽  
Bedir Yousif ◽  
Ahmed Samra

Abstract This paper discusses modeling and optimizing the performance of hybrid plasmonic bidirectional coupler which is used as a basic building block in modeling highly transmission efficiency of optoelectronic devices such as filter, wavelength division multiplexer, logic gates and switching matrix with a help of an active material (indium tin oxide) that has an electrically-adjustable permittivity. All the proposed devices satisfied high transmission efficiencies at the desired output ports over a suitable wavelength range. The realized structures are characterized and simulated by 3D finite-difference time-domain (FDTD). The components would be useful in the optical interconnect networks, photonic integrated circuits and signal processing system.


2014 ◽  
Vol 599-601 ◽  
pp. 1407-1410
Author(s):  
Xu Liang ◽  
Ke Ming Wang ◽  
Gui Yu Xin

Comparing with other High-level programming languages, C Sharp (C#) is more efficient in software development. While MATLAB language provides a series of powerful functions of numerical calculation that facilitate adoption of algorithms, which are widely applied in blind source separation (BSS). Combining the advantages of the two languages, this paper presents an implementation of mixed programming and the development of a simplified blind signal processing system. Application results show the system developed by mixed programming is successful.


2015 ◽  
Vol 645-646 ◽  
pp. 1064-1071
Author(s):  
Wei Fan ◽  
Zhong Shen Li ◽  
Shao Yin Jiang

In some areas such as micro-mechanical, ultra-precision machining, nanotechnology, the high-precision positioning and very fine vertical scanning motion are needed urgently. Therefore, the Z-axis micro-displacement driving control technology has become the key technology in these areas. The piezoelectric ceramics actuator and stepper motor were integrated into hybrid linear actuator in Z-axis nanopositioning stage, and this can simplify the structure of the drive system. By calculating the gravity center of the vertical scanning system, and using single counterweight, a new one-arm bridge type structure was built. Appropriate tension and current sensors were also equipped in order to real-time monitor the drive status. It is feasible to balance the weight with this simplified system structure, and also guarantee the driving control accuracy of nanopositioning stage. Besides, in the structural design, the Abbe error can be reduced greatly by placing the stage center, grating ruler and displacement measurement centerline on the same line with grating reading head. The driving travel of nanopositioning stage is 150mm, and driving resolution is 1nm. The designing method introduced gives a scientific method and practical reference for the development of z-axis driving control system.


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