Development of the Heterodyne Laser Encoder System for the X–Y Positioning Stage

This investigation develops a laser encoder system based on a heterodyne laser interferometer. For eliminating geometric errors, the optical structure of the proposed encoder system was carried out with the internal zero-point method. The designed structure can eliminate the geometric errors, including positioning error, straightness error, squareness error, and Abbe error of the positioning stage. The signal processing system is composed of commercial integrated circuits (ICs). The signal type of the proposed encoding system is a differential signal that is compatible with most motion control systems. The proposed encoder system is embedded in a two-dimensional positioning stage. By the experimental results of the positioning test in the measuring range of 27 mm × 27 mm, with a resolution of 15.8 nm, the maximum values of the positioning error and standard deviation are 12.64 nm and 126.4 nm, respectively, in the positioning experiments. The result shows that the proposed encoder system can fit the positioning requirements of the optoelectronic and semiconductor industries.

Modeling Method of CNC Machine Tools’ Volume Error Considering Abbe Error

Abbe error is an important factor affecting high-precision machine tools, and the traditional modeling method does not consider Abbe error. Aiming at this problem, based on the traditional error model of machine tools and the formation mechanism of Abbe error, this paper establishes a machine tool spatial error model that considers Abbe error. Then combined with a specific machine tool, based on the measurement of 21 geometric errors of the machine tool to obtain relevant error data, through the combination of qualitative and quantitative accuracy evaluation methods, two models of traditional error model and error model considering Abbe error are analyzed. The accuracy of the machine tool is compared, and the comparison of the compensation effects of the two error models after compensation is also analyzed. The example verification shows that the machine tool spatial error model considering Abbe error is effective and feasible, and the compensation effect is better. It provides an important modeling method for improving the machining accuracy of precision machine tools.

A New Computational Model of Step Gauge Calibration Based on the Synthesis Technology of Multi-Path Laser Interferometers

A step gauge is a commonly used length standard for international comparison, and its calibration accuracy is often used as a sign to measure a country’s length Calibration and Measurement Capability (CMC). Based on this, some developed countries and developing countries all over the world have been carrying out the research of precision calibration technology for step gauge. On the basis of summarizing the current situation of step gauge calibration technology in other countries, this paper presents a new computational model of step gauge calibration based on the Synthesis Technology of Multi-Path Laser Interferometers (SMLI) and an auto-collimator, which can synthesize the three laser light paths into the measured centerline of step gauge. It is very important to obtain a good measurement accuracy for the step gauge, conformed to the Abbe principle, no matter where it is installed on the CMM measurement platform. In this paper, the development of the mathematical model, the data collection algorithms, data analysis techniques, and measurement uncertainty budgets are discussed. Finally, the experimental measurement is carried out and the measurement accuracy is verified to be effective. The results show that this method can effectively avoid the influence of Abbe error in length measurement, and significantly enhance the calibration accuracy of the step gauge.

Yaw error correction of ultra-precision stage for scanning beam interference lithography systems

The stage yaw error is a key factor affecting the phase distortion of gratings produced by scanning beam interference lithography system. In order to solve this problem, a coarse-fine dual-stage mechanism is proposed, in which an ultra-precision fine positioning stage with yaw error correction function is developed. To achieve nanoscale positioning and sub-microradian yaw motion accuracy, four Lorentz motors are used to drive the fine stage. The internal coupling factors and the mechanism of Lorentz motors motion control are analyzed. Besides, the Abbe error caused by the yaw error is investigated. Positioning and scanning experiments are conducted and the outcomes show that maximum yaw error is 0.33 μrad during constant velocity scanning, which completely meets the grating fabrication requirements.

A novel method of angular positioning error analysis of rotary stages based on the Abbe principle

Abbe error is the inherent systematic error in linear displacement measurement due to the measuring axis being out of line with the moving axis. The resulting gap is called the Abbe offset, which will multiply the angular pitch error of the moving stage to become the positioning error of the linear stage along the moving axis. Analogous to the Abbe principle, in the rotary stage, the rotary encoder is used to detect the worktable’s rotational angle. The encoder is normally mounted at a distance from the bearing. This distance can be also regarded as Abbe offset. Due to the inherent tilt and radial motions of the axis of rotation, the encoder’s rotating component, that is, the circular grating, would result in a lateral displacement relative to its sensing head that is fixed inside the stage housing. The actual measured angle is, therefore, different from the commanded angle, causing the angular positioning error of the rotary stage in machine tools and open-loop controlled system. In this article, the angular positioning error of the rotary stage caused by the tilt motion error and radial motion error of the spindle, the offset and the size of encoder is analyzed and experimentally verified.