Structure Design of Large Travel One-Arm Bridge Type Z-Axis Nano-Positioning Stage

2015 ◽  
Vol 645-646 ◽  
pp. 1064-1071
Author(s):  
Wei Fan ◽  
Zhong Shen Li ◽  
Shao Yin Jiang

In some areas such as micro-mechanical, ultra-precision machining, nanotechnology, the high-precision positioning and very fine vertical scanning motion are needed urgently. Therefore, the Z-axis micro-displacement driving control technology has become the key technology in these areas. The piezoelectric ceramics actuator and stepper motor were integrated into hybrid linear actuator in Z-axis nanopositioning stage, and this can simplify the structure of the drive system. By calculating the gravity center of the vertical scanning system, and using single counterweight, a new one-arm bridge type structure was built. Appropriate tension and current sensors were also equipped in order to real-time monitor the drive status. It is feasible to balance the weight with this simplified system structure, and also guarantee the driving control accuracy of nanopositioning stage. Besides, in the structural design, the Abbe error can be reduced greatly by placing the stage center, grating ruler and displacement measurement centerline on the same line with grating reading head. The driving travel of nanopositioning stage is 150mm, and driving resolution is 1nm. The designing method introduced gives a scientific method and practical reference for the development of z-axis driving control system.

2014 ◽  
Vol 618 ◽  
pp. 492-497
Author(s):  
Shan Chen ◽  
Zhi Yuan Yao

The nanofluidic devices with the nanopores are the foundation of the third generation of the DNA sequencing technology. Comparing with the traditional nanopores constructed on the nanofilms, the nanofluidic devices made by the SiO2 have higher stiffness, strength and stability. We study on the structure design of glass capillary tension feed system, used in manufacture of the nanofluidic devices with the nanopores. Firstly, we design glass capillary tension feed system, including the mechanical moving parts, heating parts and the control parts, which is used to heat glass capillary and stretch it to get glass capillary with a smaller inner diameter in need. Among them, the control accuracy of the moving parts is up to 1μm, the heating range of heating parts is less than 5mm, and the temperature can reach 1500 ̊C. Then we make a prototype, and do some experiments with it. According to the experiment results, the system can be used for glass capillary tension, and the inner diameter of the nanoglass capillary stretched by this system is as small as 500 nm.


Micromachines ◽  
2019 ◽  
Vol 10 (9) ◽  
pp. 581 ◽  
Author(s):  
Quan Zhang ◽  
Jianguo Zhao ◽  
Xin Shen ◽  
Qing Xiao ◽  
Jun Huang ◽  
...  

A novel decoupled XY compliant micro-positioning stage, based on a bridge-type amplification mechanism and parallelogram mechanisms, is designed in this paper. Analytical models of the bridge-type amplification mechanism and parallelogram mechanisms are developed by Castigliano’s second theorem and a Beam constrained model. The amplification ratio, input stiffness, and output stiffness of the stage are further derived, based on the proposed model. In order to verify the theoretical analysis, the finite element method (FEM) is used for simulation and modal analysis, and the simulation results indicate that the errors of the amplification ratio, input stiffness, and output stiffness of the stage between the proposed model and the FEM results are 2.34%, 3.87%, and 2.66%, respectively. Modal analysis results show that the fundamental natural frequency is 44 Hz, and the maximum error between the theoretical model and the FEM is less than 4%, which further validates the proposed modeling method. Finally, the prototype is fabricated to test the amplification ratio, cross-coupling error, and workspace. The experimental results demonstrate that the stage has a relatively large workspace, of 346.1 μm × 357.2 μm, with corresponding amplification ratios of 5.39 in the X-axis and 5.51 in the Y-axis, while the cross-coupling error is less than 1.5%.


Author(s):  
Shufeng Sun

To adapt the miniaturized development tendency of nanometer positioning devices, a new type of micro-displacement stage with six degree of freedom, which can implement nanometer-level ultra-precision positioning without feedback control is designed. It takes a group of piezoelectric ceramics actuators (PZTAs) connected in series as actuation unit, takes flexure hinges as elastic guide rail. To overcome the non-linearity and hysteresis of PZTAs, binary actuation principle is adopted to control a group of actuators that work together to output many discrete, repeatable displacements. If these displacements are distributed within a scope of several microns, only simple on and off actuator commands may obtain nanometer-level repeatable positioning without feedback control. Theoretical calculation and finite element analysis (FEA) are used to design and simulate the stage. Expressions of rigidity and stress are obtained by theoretical calculation. FEA and experimental results verify the rationality and feasibility of the stage.


2019 ◽  
Vol 79 ◽  
pp. 03006
Author(s):  
Limian Wang ◽  
Shumao Wang ◽  
Zhenghe Song

Electric vehicles are recognized as an effective way to alleviate the energy crisis and environmental degradation, and extended range electric vehicles which have both the technical advantages of hybrid electric vehicles and pure electric vehicles, have gradually become a research hotspot in the automotive industry. In this paper, the system structure design of the extended range electric vehicle is carried out. On the basis of the pure electric vehicle, the engine and generator set are added. The control strategy model is established and the simulation research is carried out. The results show that the proposed control strategy model optimizes the working range of the range extender, takes into account the performance of the battery and the drive motor, and shows good tracking characteristics.


1983 ◽  
Vol 37 (6) ◽  
pp. 502-508 ◽  
Author(s):  
Hironori Susaki ◽  
Takao Miyama ◽  
Shigeru Matsui ◽  
Shigeo Minami

A distributed microcomputer network system which consists of integral microprocessors in intelligent instruments has been developed for automating the spectroscopy laboratory. In this system, the master-slave arrangement of microcomputers is adopted to compose the system controller and three microcomputer-based spectrophotometers (an UV/visible spectrophotometer, an IR spectrophotometer, and a fluorescence spectrophotometer). The IEEE-488 standard interface bus is employed for the hardware compatibility of the communication between the system controller and spectrophotometer subsystems. The Tiny BASIC language is modified as a standard language in the system for real time execution along the communication through the IEEE-488 interface bus. The operation includes two modes: the local mode and the remote mode. In the local mode, the spectrophotometer is manually controlled independently from the system controller. In the remote mode, the modified Tiny BASIC program controls individual spectrophotometers. The program is written by the user at the system controller and is loaded down to the microcomputer of a spectrophotometer subsystem. This program is executed via the individual modified Tiny BASIC interpreter implemented in the subsystem. The system structure, design of the modified Tiny BASIC, and operating procedures are presented together with typical performance data.


2011 ◽  
Vol 88-89 ◽  
pp. 175-179
Author(s):  
Xiao Gang Wang ◽  
Qin Zheng ◽  
Xin Zhan Li

In this article we discuss a new method for describing the 3D shape of woman warm jacket and set up its mathematic model, which is by dint of body scanning technology. Telmat scanning system scanned samples. The scanning point cloud were analyzed in horizontal and vertical sections. Outlines of vertical sections were described and mathematic models were set up. The result helped to prognosticate the shape of woman warm jacket. A new describing method for 3D shape is discussed. And it opens our mind to utilize body-scanning technology for deeper science research.


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