Physicochemical and structural characteristics of TiC and VC thin films deposited by DC reactive magnetron sputtering

2010 ◽  
Vol 45 (18) ◽  
pp. 4994-5001 ◽  
Author(s):  
C. Aguzzoli ◽  
C. A. Figueroa ◽  
G. V. Soares ◽  
I. J. R. Baumvol
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Structural Characteristics ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering

Room temperature deposition of crystalline HfN thin films by DC reactive magnetron sputtering

2021 ◽  
Author(s):  
Wuttichai Phae-ngam ◽  
Tossaporn Lertvanithphol ◽  
Chanunthorn Chananonnawathorn ◽  
Rattanachai Kowong ◽  
Mati Horprathum ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering ◽  
Temperature Deposition

Growth and characterization of NiO thin films prepared by dc reactive magnetron sputtering

2011 ◽  
Vol 13 (2) ◽  
pp. 314-320 ◽  
Author(s):  
A. Mallikarjuna Reddy ◽  
A. Sivasankar Reddy ◽  
Kee-Sun Lee ◽  
P. Sreedhara Reddy
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering

scholarly journals Effect of post annealed treatment on HfN thin films prepared by DC reactive magnetron sputtering

2020 ◽  
Author(s):  
W. Phae-ngam ◽  
J. Prathumsit ◽  
G. Gitgeatpong ◽  
C. Chananonnawathorn ◽  
T. Lertvanithphol ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering
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