Three-dimensional coordinate measurement of microstructures based on nano measuring machine

Purpose The purpose of this paper is to analyze the measurement error of a three-dimensional coordinate measurement system based on dual-position-sensitive detector (PSD) under different background light. Design/methodology/approach The mind evolutionary algorithm (MEA)-back propagation (BP) neural network is used to predict the three-dimensional coordinates of the points, and the influence of the background light on the measurement accuracy of the three-dimensional coordinates based on PSD is obtained. Findings The influence of the background light on the measurement accuracy of the system is quantitatively calculated. The background light has a significant influence on the prediction accuracy of the three-dimensional coordinate measurement system. The optical method, electrical method and photoelectric compensation method are proposed to improve the measurement accuracy. Originality/value BP neural network based on MEA is applied to the coordinate prediction of the three-dimensional coordinate measurement system based on dual-PSD, and the influence of background light on the measurement accuracy is quantitatively analyzed.

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Computer-Aided Coordinate Metrology

13th Computers in Engineering Conference ◽

10.1115/cie1993-0028 ◽

1993 ◽

Author(s):

Hong-Tzong Yau ◽

Chia-Hsiang Menq

Keyword(s):

Three Dimensional ◽

Coordinate Measuring Machine ◽

Computer Integrated Manufacturing ◽

Integrated Manufacturing ◽

Coordinate Metrology ◽

Cad Cam ◽

Measuring Machine ◽

Three Dimensional Coordinate ◽

Inspection Machine ◽

Accuracy And Repeatability

Abstract Three-dimensional coordinate metrology has gained much attention in recent years. On one hand, the accuracy and repeatability of a coordinate measuring machine (CMM) are approaching the sub-micron level. On the other hand, there is hardly any part that exists of which the dimensions cannot be measured with a CMM. This paper presents the recent development and applications in three-dimensional coordinate metrology. The emphasis has been placed in the utilization of computers and integration with CAD/CAM systems. Three important technologies, namely, CAD-directed inspection, three-dimensional optimal match, and reverse engineering are presented and discussed. With computers and CAD/CAM support, three-dimensional coordinate metrology has become an active part of the computer-integrated manufacturing (CIM). Its versatility and high degree of automation have made the CMM a universal inspection machine for quality control of manufactured parts in computer integrated manufacturing.

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Application of the Three Dimensional Coordinate Measuring Machine (CAD/CAM for the New Cosmetic Hand)

Journal of Robotics and Mechatronics ◽

10.20965/jrm.1989.p0192 ◽

1989 ◽

Vol 1 (3) ◽

pp. 192-201

Author(s):

Yukio Saito ◽

◽

Takanori Higashihara ◽

Torn Oshima ◽

Takamitu Tajima ◽

...

Keyword(s):

Three Dimensional ◽

Coordinate Measuring Machine ◽

Automatic Measurement ◽

Surface Shape ◽

Human Hand ◽

Shape Processing ◽

Soft Objects ◽

Cad Cam ◽

Measuring Machine ◽

Three Dimensional Coordinate

The purpose of this research was to develop a CAD/ CAM system for soft objects such as the human hand. In this article are described the various steps in this process, including digitization of the shape by automatic measurement of the object shape processing such as shape interpolation and correction, additional shape processing, motion simulation for the digitized soft model, and reproduction of the shape as a positive model. As an example, we established a method for making a new cosmetic hand that could meet the necessary requirements of shape and functionality. For the shape, we measured the natural hand of a disabled person automatically with a three-dimensional coordinate measuring machine, performed data processing, and produced a positive model for the cosmetic hand. For functionality, we simulated the change of surface shape caused by finger motion using the shape of the measured hand, and then developed the inside mechanism of the cosmetic hand. This article describes the system developed for application to the cosmetic hand.

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