Study on the Characteristics of Thermal Plasma-Catalysis Scrubber Using Fluidized Bed for CF₄ Removal
2022 ◽
Vol 46
(1)
◽
pp. 19-27
2011 ◽
Vol 14
(1)
◽
2018 ◽
Vol 8
(4)
◽
pp. 936-954
◽
2018 ◽
Vol 51
(27)
◽
pp. 274003
◽
Keyword(s):
Keyword(s):