Silicon Carbon Nitride Thin Films Deposited by Pulsed Microwave Plasma Assisted Chemical Vapour Deposition

Paul Kouakou; Pamela Yoboue; Bafetigue Ouattara; Mohammed Belmahi; Jamal Bougdira

doi:10.3923/jas.2017.306.314

Silicon Carbon Nitride Thin Films Deposited by Pulsed Microwave Plasma Assisted Chemical Vapour Deposition

Journal of Applied Sciences ◽

10.3923/jas.2017.306.314 ◽

2017 ◽

Vol 17 (6) ◽

pp. 306-314

Author(s):

Paul Kouakou ◽

Pamela Yoboue ◽

Bafetigue Ouattara ◽

Mohammed Belmahi ◽

Jamal Bougdira

Keyword(s):

Thin Films ◽

Chemical Vapour Deposition ◽

Carbon Nitride ◽

Vapour Deposition ◽

Microwave Plasma ◽

Chemical Vapour ◽

Silicon Carbon ◽

Silicon Carbon Nitride

Download Full-text

Multi-phase structured silicon carbon nitride thin films prepared by hot-wire chemical vapour deposition

Thin Solid Films ◽

10.1016/j.tsf.2011.01.133 ◽

2011 ◽

Vol 519 (15) ◽

pp. 5082-5085 ◽

Cited By ~ 6

Author(s):

Mohd Ragib Badaruddin ◽

Muhamad Rasat Muhamad ◽

Saadah Abdul Rahman

Keyword(s):

Thin Films ◽

Chemical Vapour Deposition ◽

Carbon Nitride ◽

Vapour Deposition ◽

Chemical Vapour ◽

Hot Wire ◽

Silicon Carbon ◽

Multi Phase ◽

Silicon Carbon Nitride

Download Full-text

Preliminary Synthesis of Carbon Nitride Thin Films by N2/CH4 Microwave Plasma Assisted Chemical Vapour Deposition: Characterisation of the Discharge and the Obtained Films

Plasma Processes and Polymers ◽

10.1002/ppap.200730703 ◽

2007 ◽

Vol 4 (S1) ◽

pp. S210-S214 ◽

Cited By ~ 6

Author(s):

Paul Kouakou ◽

Valérie Brien ◽

Badreddine Assouar ◽

Virginie Hody ◽

Mohammed Belmahi ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapour Deposition ◽

Carbon Nitride ◽

Vapour Deposition ◽

Microwave Plasma ◽

Chemical Vapour

Download Full-text

Multi-phase structured hydrogenated amorphous silicon carbon nitride thin films grown by plasma enhanced chemical vapour deposition

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2017.05.289 ◽

2017 ◽

Vol 721 ◽

pp. 70-79 ◽

Cited By ~ 9

Author(s):

Mohd Azam Abdul Rahman ◽

Wee Siong Chiu ◽

Choon Yian Haw ◽

Ragib Badaruddin ◽

Fatemeh Shariatmadar Tehrani ◽

...

Keyword(s):

Thin Films ◽

Amorphous Silicon ◽

Chemical Vapour Deposition ◽

Carbon Nitride ◽

Vapour Deposition ◽

Hydrogenated Amorphous Silicon ◽

Chemical Vapour ◽

Silicon Carbon ◽

Multi Phase ◽

Hydrogenated Amorphous

Download Full-text

Preparation of (Tl, Bi, Pb)-Sr-Ca-Cu-O superconducting thin films by the mist microwave plasma chemical vapour deposition method

Journal of Materials Science Letters ◽

10.1007/bf00422674 ◽

1995 ◽

Vol 14 (23) ◽

pp. 1681-1683

Author(s):

N. Takahashi ◽

A. Koukitu ◽

H. Seki

Keyword(s):

Thin Films ◽

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Microwave Plasma ◽

Chemical Vapour ◽

Superconducting Thin Films ◽

Deposition Method ◽

Plasma Chemical ◽

Plasma Chemical Vapour Deposition ◽

Chemical Vapour Deposition Method

Download Full-text

Preparation of low resistivity tungsten thin films deposited by microwave-plasma-enhanced chemical vapour deposition from the tungsten hexafluoride-hydrogen system

Thin Solid Films ◽

10.1016/0040-6090(94)90446-4 ◽

1994 ◽

Vol 241 (1-2) ◽

pp. 301-304 ◽

Cited By ~ 3

Author(s):

A. Belkacem ◽

Y. Arnal ◽

J. Pelletier ◽

E. André ◽

J.C. Oberlin

Keyword(s):

Thin Films ◽

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Microwave Plasma ◽

Chemical Vapour ◽

Low Resistivity ◽

Hydrogen System ◽

Tungsten Hexafluoride

Download Full-text

Nanostructured silicon carbon thin films grown by plasma enhanced chemical vapour deposition technique

Thin Solid Films ◽

10.1016/j.tsf.2013.03.073 ◽

2013 ◽

Vol 543 ◽

pp. 27-31 ◽

Cited By ~ 2

Author(s):

U. Coscia ◽

G. Ambrosone ◽

D.K. Basa ◽

V. Rigato ◽

S. Ferrero ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Chemical Vapour ◽

Deposition Technique ◽

Nanostructured Silicon ◽

Silicon Carbon ◽

Chemical Vapour Deposition Technique ◽

Carbon Thin Films

Download Full-text

As-grown preparation of Ag-doped Y-Ba-Cu-O superconducting thin films by mist microwave plasma chemical vapour deposition

Journal of Materials Science Letters ◽

10.1007/bf00270999 ◽

1995 ◽

Vol 14 (24) ◽

pp. 1757-1760 ◽

Cited By ~ 1

Author(s):

N. Takahashi ◽

A. Koukitu ◽

H. Seki

Keyword(s):

Thin Films ◽

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Microwave Plasma ◽

Chemical Vapour ◽

Superconducting Thin Films ◽

Plasma Chemical ◽

Plasma Chemical Vapour Deposition

Download Full-text

A structural study of organo-silicon polymeric thin films deposited by remote microwave plasma enhanced chemical vapour deposition

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2003.10.031 ◽

2004 ◽

Vol 180-181 ◽

pp. 244-249 ◽

Cited By ~ 20

Author(s):

A. Barranco ◽

J. Cotrino ◽

F. Yubero ◽

T. Girardeau ◽

S. Camelio ◽

...

Keyword(s):

Thin Films ◽

Structural Study ◽

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Microwave Plasma ◽

Chemical Vapour ◽

Polymeric Thin Films

Download Full-text

A Study of Diamond-Like Carbon Thin Films Prepared by Microwave Plasma Chemical Vapour Deposition

Plasma Science and Technology ◽

10.1088/1009-0630/9/4/13 ◽

2007 ◽

Vol 9 (4) ◽

pp. 444-447 ◽

Cited By ~ 3

Author(s):

Lai Xiuqiong ◽

Chen Junfang ◽

Fu Silie ◽

Li Wei ◽

Zhang Maoping ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Microwave Plasma ◽

Chemical Vapour ◽

Diamond Like Carbon ◽

Plasma Chemical ◽

Plasma Chemical Vapour Deposition ◽

Carbon Thin Films

Download Full-text

Synthesis and characterization of carbon nitride thin films obtained by laser induced chemical vapour deposition

Surface and Coatings Technology ◽

10.1016/s0257-8972(99)00577-0 ◽

2000 ◽

Vol 125 (1-3) ◽

pp. 301-307 ◽

Cited By ~ 16

Author(s):

A. Crunteanu ◽

M. Charbonnier ◽

M. Romand ◽

F. Vasiliu ◽

D. Pantelica ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapour Deposition ◽

Carbon Nitride ◽

Vapour Deposition ◽

Chemical Vapour ◽

Synthesis And Characterization

Download Full-text