A Study of Diamond-Like Carbon Thin Films Prepared by Microwave Plasma Chemical Vapour Deposition

2007 ◽  
Vol 9 (4) ◽  
pp. 444-447 ◽  
Author(s):  
Lai Xiuqiong ◽  
Chen Junfang ◽  
Fu Silie ◽  
Li Wei ◽  
Zhang Maoping ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Microwave Plasma ◽  
Chemical Vapour ◽  
Diamond Like Carbon ◽  
Plasma Chemical ◽  
Plasma Chemical Vapour Deposition ◽  
Carbon Thin Films

Microwave plasma chemical vapour deposition of diamond like carbon thin films

1998 ◽  
Vol 278 (1-2) ◽  
pp. 130-134 ◽  
Author(s):  
D.S Patil ◽  
K Ramachandran ◽  
N Venkatramani ◽  
M Pandey ◽  
S Venkateswaran ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Microwave Plasma ◽  
Chemical Vapour ◽  
Diamond Like Carbon ◽  
Plasma Chemical ◽  
Plasma Chemical Vapour Deposition ◽  
Carbon Thin Films
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