Self-assembled ZnO Nano-structures Grown on Sapphire(0001) Substrate by Radio Frequency Magnetron Sputtering

2010 ◽  
Vol 56 (5) ◽  
pp. 1492-1496 ◽  
Author(s):  
Hyon Chol Kang ◽  
Seon Hee Seo
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Nano Structures ◽  
Self Assembled

The Atomic Force Microscope Study of Self-Assembled Silicon Nanodots Growth Using Magnetron Sputtering System

2013 ◽  
Vol 795 ◽  
pp. 721-725 ◽  
Author(s):  
Fatima Aldaw Idrees ◽  
Samsudi Sakrani ◽  
Zulkafli Othaman
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Experimental Conditions ◽  
Growth Technique ◽  
Atomic Force ◽  
Self Assembled ◽  
Temperature Time ◽  
Sputtering System

In this paper self-assembled silicon nanodots have been grown on silicon substrate using radio-frequency magnetron sputtering system. This system were settled at varying experimental conditions such as substrate temperature, time of deposition, RF power and fixed argon flow rate. Then the surface roughness was measured by AFM which resulted average dots size of 113 nm. However, the presence of a small amount of grain atoms formed on the surface was confirmed using SEM measurement. The crystalline Si-NDs with (100) plane contributed sharp diffraction peak located at 69.5° was confirmed using XRD measurement. These results of Si-NDs structural properties support the possible growth technique of radio-frequency magnetron sputtering.

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