Structural, Electrical, and Optical Properties of ZnO:Ga Films Grown by the RF Magnetron Sputtering Method under Different Substrate Temperatures

New Physics Sae Mulli ◽

10.3938/npsm.63.1317 ◽

2013 ◽

Vol 63 (12) ◽

pp. 1317-1322

Author(s):

Seungmin Park ◽

Youngho Um* ◽

Younghun Hwang

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Substrate Temperatures

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Investigation of the electrical and optical properties of nickel oxide films produced by RF magnetron sputtering method

Journal of Physics Conference Series ◽

10.1088/1742-6596/1124/4/041042 ◽

2018 ◽

Vol 1124 ◽

pp. 041042

Author(s):

A Aglikov ◽

A Mozharov ◽

D Kudryashov ◽

D Sosnin ◽

A Vasilev ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Nickel Oxide ◽

Oxide Films ◽

Rf Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Nickel Oxide Films

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Structural, electrical, and optical properties of F-doped SnO or SnO 2 films prepared by RF reactive magnetron sputtering at different substrate temperatures and O 2 fluxes

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2017.05.193 ◽

2017 ◽

Vol 719 ◽

pp. 429-437 ◽

Author(s):

B.L. Zhu ◽

X. Zhao ◽

W.C. Hu ◽

T.T. Li ◽

J. Wu ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Electrical And Optical Properties ◽

Substrate Temperatures

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Improving the electrical and optical properties of CuCrO2 thin film deposited by reactive RF magnetron sputtering in controlled N2/Ar atmosphere

Applied Physics A ◽

10.1007/s00339-018-1945-2 ◽

2018 ◽

Vol 124 (8) ◽

Author(s):

Morteza Ahmadi ◽

Morteza Asemi ◽

Majid Ghanaatshoar

Keyword(s):

Thin Film ◽

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Reactive Rf Magnetron Sputtering

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Dependence of Electrical and Optical Properties of the Al Doped ZnO for Transparent Conductors Deposited by rf–Magnetron Sputtering on the O2/Ar Gas Flow Ratio

Key Engineering Materials - High-Performance Ceramics IV ◽

10.4028/0-87849-410-3.564 ◽

2007 ◽

pp. 564-566

Author(s):

Chong Mu Lee ◽

Keun Bin Yim ◽

Choong Mo Kim

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Gas Flow ◽

Rf Magnetron Sputtering ◽

Transparent Conductors ◽

Electrical And Optical Properties ◽

Gas Flow Ratio ◽

Doped Zno ◽

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Electrical and optical properties of nanosized films of doped zinc and indium oxides deposited by RF magnetron sputtering at room temperature

Technical Physics Letters ◽

10.1134/s1063785015080325 ◽

2015 ◽

Vol 41 (8) ◽

pp. 804-806 ◽

Author(s):

D. V. Sosnin ◽

D. A. Kudryashov ◽

S. A. Gudovskikh ◽

K. S. Zelentsov

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Room Temperature ◽

Rf Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Indium Oxides ◽

Nanosized Films

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Study on the structural, electrical and optical properties of Al-F co-doped ZnO thin films prepared by RF magnetron sputtering

Optoelectronics Letters ◽

10.1007/s11801-011-9266-0 ◽

2011 ◽

Vol 7 (1) ◽

pp. 45-48 ◽

Author(s):

Rui-xin Ma ◽

Mu-kong Wang ◽

Bo Kang ◽

Yong-gang Wang

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Electrical And Optical Properties ◽

Doped Zno ◽

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The Electrical and Optical Properties of Fe–O–N Thin Films Deposited by RF Magnetron Sputtering

MATERIALS TRANSACTIONS ◽

10.2320/matertrans.m2013170 ◽

2013 ◽

Vol 54 (10) ◽

pp. 2055-2058 ◽

Author(s):

Yukiko Ogawa ◽

Daisuke Ando ◽

Yuji Sutou ◽

Junichi Koike

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Electrical And Optical Properties

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Electrical and Optical Properties of Cadmium Stannate Deposited by RF Magnetron Sputtering

Molecular Crystals and Liquid Crystals ◽

10.1080/15421406.2010.497045 ◽

2010 ◽

Vol 532 (1) ◽

pp. 106/[522]-111/[527]

Author(s):

Sang-Hwan Lee ◽

Eun-Woo Lee ◽

Soon-Yong Park ◽

Chan-Wook Jeon

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Cadmium Stannate

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Electrical and optical properties of ZnO:Al film prepared on polyethersulfone substrate by RF magnetron sputtering

Colloids and Surfaces A Physicochemical and Engineering Aspects ◽

10.1016/j.colsurfa.2008.11.049 ◽

2009 ◽

Vol 337 (1-3) ◽

pp. 52-56 ◽

Author(s):

Y.C. Lin ◽

M.Z. Chen ◽

C.C. Kuo ◽

W.T. Yen

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Electrical And Optical Properties

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Structural, electrical and optical properties of zinc nitride thin films prepared by reactive rf magnetron sputtering

Thin Solid Films ◽

10.1016/s0040-6090(97)00910-3 ◽

1998 ◽

Vol 322 (1-2) ◽

pp. 274-281 ◽

Author(s):

Masanobu Futsuhara ◽

Katsuaki Yoshioka ◽

Osamu Takai

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Zinc Nitride ◽

Reactive Rf Magnetron Sputtering

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