The effects of helium concentration and displacement damage on microstructural evolution at low dpa and low helium concentration were mainly investigated in specimens of austenitic stainless steel 316FR or SUS304 and a high chromium martensitic steel (HCM12A). The 316FR and HCM12A specimens were implanted uniformly with helium at 823 K up to 30 appm-He or 50 appm-He by 50 MeV cyclotron accelerator using energy degraders. After the helium implantation, the microstructures were examined by a transmission electron microscopy and positron annihilation lifetime measurements. Irradiation hardening behaviors were analyzed using SUS304 and HCM12A steels at 823 K implanted with He ion up to 100 appm with different He/dpa ratios in the HIT ion irradiation experiments and the hardening behaviors were examined by nano indentation method. In the irradiation and annealing specimens, these mechanical properties and microstructures were examined to understand the effects of helium production, displacement damage and annealing on microstructural development, and kinetic Monte Carlo (kMC) simulations were also performed to understand the microstructural development, and the results were compared with the results of TEM observation and positron annihilation lifetime measurements. Important some differences in the microstructural developments such as cavity formation and growth between austenitic stainless steel and martensitic steel were observed in low dpa and low helium concentration conditions.