Al and Sb codoped ZnO thin films were prepared through a sol-gel spin coating method on glass substrates and annealed in different atmospheres. The XRD results show that the films have hexagonal wurtzite ZnO structure and SEM results reveal that the films annealed in hydrogen consist of hexagonal nanorods with diameters of 84 nm and lengths of 422 nm, however the films annealed in other atmospheres without nanorods. The photoluminescence (PL) spectrum shows that the emission peaks of the films are mostly at 390 and 460 nm, and the film annealed in hydrogen has the strongest intensity of peak at 390 nm and the film annealed in air has the strongest intensity of peak at 460 nm. The electrical properties show that the films annealed in hydrogen have a lowest resistivity of 1.02×10-3 Ω•cm.
