A Novel RFID-Based Thermal Convection Accelerometer with Heater and Thermal Piles Deposited by E-Gun Focused on Mixing Powders of Metals

2013 ◽  
Vol 364 ◽  
pp. 262-266
Author(s):  
Jium Ming Lin ◽  
Cheng Hung Lin
Keyword(s):  
Thermal Convection ◽  
Room Temperature ◽  
Flexible Substrate ◽  
Cold Region ◽  
Rfid Tag ◽  
Active Rfid ◽  
New Device ◽  
Polyimide Substrate ◽  
Power Leakage ◽  
Rectangular Chamber

This paper proposes an innovated method to integrate an active RFID tag with a thermal convection accelerometer with heater and thermal piles deposited on a flexible substrate by E-gun, thus it is a wireless sensor for easy usage in many fields. The other advantages of the new device are as: (1) The thermal conductivity (λ148W/(mK)) of the traditional Si is about 25 times of the proposed polyimide substrate (λ6-0.17W/(mK)), thus the power leakage through the substrate is reduced. (2) The heaters and the thermal piles are deposited by E-gun focused on a target of mixing powders of metals on the flexible substrate, so it is different from the traditional ones by using the structures floating over a grooved cavity. Thus the new device is not only easy to make, but more reliable to operate in large acceleration impact condition without damage. (3) The thermal piles are divided into two portions respectively exposed to a cold region and a hot region. The cold junctions of thermal piles are put outside the cap to make it exactly at the room temperature, thus the device is very easy to calibrate and more accurate. (4) The chamber is filled with another kind of gas such as Xe or Ar to avoid the oxidizing effect produced by the commercial ones with carbon dioxide or air, and then the reliability as well as the life cycle of the heater can be increased. (5) By the results of simulation, one can see the traditional rectangular chamber can be replaced by a hemi-cylindrical one to extend both the operation range and sensitivity of the thermal convection accelerometer.

A Novel Wireless Thermal Convection Type Angular Accelerometer Integrated with an Active RFID-Tag

2013 ◽  
Vol 284-287 ◽  
pp. 2005-2008 ◽  
Author(s):  
Jium Ming Lin ◽  
Kuo Hsiung Cho ◽  
Cheng Hung Lin ◽  
Hung Han Lu
Keyword(s):  
Thermal Convection ◽  
Response Times ◽  
Flexible Substrate ◽  
Wireless Sensor ◽  
Rfid Tag ◽  
Active Rfid ◽  
Angular Accelerometer ◽  
Innovative Idea ◽  
Carbon Dioxide Co2 ◽  
Oxidation Effect

Five novel ideas are proposed in this paper to integrate an active RFID tag with thermal convection angular accelerometer on a flexible substrate, thus the device is a wireless sensor. The first innovative idea is that this device is without any movable parts, so it is very reliable. The second new idea is that it is made on a flexible substrate, such as plastic or polyimide, thus it can save more power. The third new idea is that the xenon gas is applied in the chamber to conduct the heat instead of the traditional Carbon dioxide. CO2 can produce oxidation effect to the heater and thermal sensors, while the xenon not. The fourth new idea is to apply a hemi-spherical chamber; it is more streamline in nature with less drag effect to ease the fluid flow and yield quicker response. The fifth new idea and the most powerful one is that the angular accelerometer is integrated with an active RFID tag on the same flexible substrate, thus the device becomes a more useful wireless sensor. Note the linearity, sensitivity, and response times of step-input angular accelerations are better for the hemi-spherical chamber filled with Xe gas. The sensitivity is 71.4°C/(rad/s2) and the response time is 60μs.

RFID-Based Thermal Convection Non-Floating Type Accelerometer with Stacking Material for Heater and Thermal Sensors

2015 ◽  
Vol 764-765 ◽  
pp. 1344-1348
Author(s):  
Jium Ming Lin ◽  
Cheng Hung Lin ◽  
Chia Hsien Lin
Keyword(s):  
Thermal Convection ◽  
Flexible Substrate ◽  
Nonlinear Effects ◽  
Thermal Sensors ◽  
Cylindrical Chamber ◽  
Floating Structures ◽  
New Device ◽  
Air Bags ◽  
Rectangular Chamber ◽  
Floating Type

This research proposes a wireless non-floating type thermal convection accelerometer, in which the heaters and the thermal sensors were made on the surface of a flexible substrate with a stacking material (such as aluminum nitride with thickness 1mm), this new device is different from those of the traditional floating structures with a grooved chamber in the silicon substrate. Thus one can integrate both a thermal convection accelerometer and a wireless RFID antenna on the same substrate, and this accelerometer is a wireless one and very convenient for fabrication and usage. Besides, the filling gas was changed as xenon to avoid the oxidizing effect that will be produced by the previously used CO2or air. Thus not only the reliability but the life cycle of the heater can be increased. The performances by using the traditional rectangular chamber for either xenon or CO2without stacking material had nonlinear effects. But the cases by using a stacking layer and xenon gas are always better. Comparisons with the previous accelerometer with rectangular chamber, stacking material and filled by CO2are also made (with sensitivity 0.182°C/G), the sensitivity for the new one with hemi-cylindrical chamber, xenon gas and stacking material is better (0.227°C/G) and without nonlinear effect in larger accelerations. The new device can be used in the applications of air bags and munition industry.

Wireless Thermal Convection Accelerometer on a RFID-Tag with Heater and Thermal Piles Deposited by E-Beam

2013 ◽  
Vol 328 ◽  
pp. 808-812
Author(s):  
Jium Ming Lin ◽  
Cheng Hung Lin
Keyword(s):  
Response Time ◽  
Thermal Convection ◽  
Stream Line ◽  
Cylindrical Chamber ◽  
Rfid Tag ◽  
New Device ◽  
Innovative Method ◽  
Input Acceleration ◽  
Rectangular Chamber ◽  
Device Sensitivity

This paper proposes an innovative method to make a thermal convection accelerometer on an active RFID tag, thus the device is a wireless acceleration sensor and can save more power. The heaters and the thermal piles are deposited by E-beam focused on a target of mixing powders of metals on the RFID tag. Thus the new device is very easy to make. Besides, a hemi-cylindrical chamber and inert xenon (Xe) gas are used to replace the traditional rectangular one with carbon dioxide (CO2). The gas molecular weight of Xe is three times larger than CO2, so the xenon gas inertia is larger and can yield quicker response. Moreover, the proposed hemi-cylindrical chamber is more stream-line in nature, thus it is with less drag effect. Note the device sensitivity when using rectangular chamber and CO2 gas is better at low acceleration. However, the performance is not only begin to decrease for acceleration larger than 18G (1G=9.8 m/s2), but even less than that using Xe gas for acceleration larger than 28G. Contrarily, when using the hemi-cylindrical chamber the device is without the above effects. Comparison of device response for step-input acceleration of 32G is also made; when using rectangular chamber and Xe gas the device response time is 31μs, but it is 60μs for the case with CO2 gas. However, when using hemi-cylindrical chamber and Xe gas the device response time is 15μs, it is about 20.2% of CO2 (74μs). Thus it is better to use either Xe gas or hemi-cylindrical chamber.

An Innovative and Reliable Wireless Angular Accelerometer Made Directly on a Flexible Substrate without Moving Parts

2015 ◽  
Vol 764-765 ◽  
pp. 1293-1297
Author(s):  
Jium Ming Lin ◽  
Cheng Hung Lin ◽  
Chia Hsien Lin
Keyword(s):  
Flexible Substrate ◽  
Angular Acceleration ◽  
Response Speed ◽  
No Oxidation ◽  
Rfid Tag ◽  
Active Rfid ◽  
New Device ◽  
Angular Accelerometer ◽  
And Performance ◽  
Floating Type

Five novel ideas are proposed in this paper to integrate an active RFID tag with a thermal convection angular accelerometer on a flexible substrate, thus the new device becomes a wireless sensor. The first innovative idea is that this device is without any movable parts, so it is very reliable. The second new idea is that it is made on a flexible substrate, such as plastic or polyimide, the thermal conductivity of the flexible substrate is much lower than silicon, and thus it can save more power and very useful for mobile operation. The third new idea is to apply xenon gas in the chamber to conduct the heat instead of the traditional carbon dioxide, so no oxidation and performance degradation effects will be produced on the heater and thermal sensors. The fourth new idea is to integrate with an active RFID tag on the same substrate, thus the device becomes a more useful wireless angular acceleration sensor. The final new idea is to apply a hemispherical chamber instead of the conventional rectangular one. From the simulation results one can see it is a good idea to apply a non-floating type angular accelerometer with a hemispherical chamber, the sensitivity performance is the best (395K/(rad/sec2)), and the response speed (693μs) is also comparable to the traditional one by using a floating type with a rectangular chamber (593μs). In summary, from the considerations of reliability, cost and performance, the non-floating type angular accelerometer with hemispherical chamber is a better choice.

A Novel Wireless Energy Saving and Reliable Angular Accelerometer on Engineering Polyimide with Xenon Gas Filled in Chamber

2013 ◽  
Vol 631-632 ◽  
pp. 1207-1210
Author(s):  
Jium Ming Lin ◽  
Chien Chow Liaw ◽  
Wen Chen Luo ◽  
Cheng Hung Lin
Keyword(s):  
Thermal Convection ◽  
Response Speed ◽  
Plastic Substrate ◽  
Floating Structure ◽  
Rfid Tag ◽  
Active Rfid ◽  
Angular Accelerometer ◽  
Engineering Plastic ◽  
Innovative Idea ◽  
Oxidation Effect

Four novel ideas are proposed in this paper to integrate an active RFID tag with thermal convection angular accelerometer on an engineering plastic substrate, thus the device is a wireless sensor. The first innovative idea is that this device is without any movable parts, so it is very reliable. The second new idea is that it is made on an engineering plastic substrate, such as polyimide, the thermal conductivity is much lower than silicon, so it can save more power and very useful for mobile operation. The third new idea is that the xenon gas is applied in the chamber for heat convection instead of CO2 used in the traditional thermal convection accelerometer. Carbon dioxide can produce oxidation effect to the heater and thermal sensors, while the inert gas xenon will not. The fourth new idea is the most powerful one to integrate with an active RFID tag on the same substrate, thus it is very useful for mobile operation, and is very easy for usage and fabrication. If one considers sensitivity as the first priority, then choose the floating structure (233°C/(rad/s2)). On the other hand, if the response speed is the requirement, then the non-floating structure is better (70μs).

A Novel Thermal Convection Angular Accelerometer and Integrated with RFID Tag on a Flexible Substrate

2013 ◽  
Vol 19 (5) ◽  
pp. 1239-1243
Author(s):  
Jium-Ming Lin ◽  
Wen-Chen Luo ◽  
Cheng-Hung Lin ◽  
Hung-Han Lu
Keyword(s):  
Thermal Convection ◽  
Flexible Substrate ◽  
Rfid Tag ◽  
Angular Accelerometer

A Novel Low Temperature Method to Make a Wireless Accelerometer

2011 ◽  
Vol 121-126 ◽  
pp. 652-661
Author(s):  
Jium Ming Lin ◽  
Po Kuang Chang ◽  
Cheng Hung Lin ◽  
Qi Kun Zhang
Keyword(s):  
Low Temperature ◽  
Substrate Surface ◽  
Flexible Substrate ◽  
Response Speed ◽  
Floating Structure ◽  
Manufacturing Method ◽  
Temperature Method ◽  
Power Leakage ◽  
Rectangular Chamber ◽  
Wireless Accelerometer

This research proposes a novel low temperature manufacturing method to make a wireless accelerometer on a flexible substrate. The substrate deposition temperature is 100°C without causing any strain and stress problem. Since the thermal conductivity of the traditional Si is 1.48 W/ (cm-K), which is 25 times of the flexible substrate, i.e. 0.06-0.0017 W/ (cm-K), thus the power leakage through the substrate can be saved by the new design. The key technology is to integrate a thermal bubble accelerometer and a wireless RFID antenna on the same substrate, such that the accelerometer is very convenient for fabrication and usage. In this paper the heaters and the thermal piles are directly adhering on the substrate surface without the traditional floating structure. Thus the structure is much simpler and cheaper for manufacturing, and much more reliable in large acceleration impact condition without broken. Furthermore, the molecular weight of xenon gas (131.29 g/mol) is much larger than carbon dioxide (44.01 g/mol), thus the performance of the accelerometer will be increased. In addition, the shape of the chamber is changed as a semi-cylindrical one instead of the conventional rectangular type. The average sensitivity is increased by 15%. In addition, if one applies only xenon gas but keeping the rectangular chamber, then the response speed can be increased by 23%. Moreover, if one applies both Xe and the semi-cylindrical chamber, then the response speed can be increased by 43%.

Integrating Thermal Convection Non-Floating Type Inclinometer and RFID Tag

2013 ◽  
Vol 765-767 ◽  
pp. 2333-2336
Author(s):  
Jium Ming Lin ◽  
Cheng Hung Lin
Keyword(s):  
Thermal Convection ◽  
Flexible Substrate ◽  
Cylindrical Shape ◽  
Floating Structure ◽  
Rfid Tag ◽  
Operating Range ◽  
Sensitivity Curves ◽  
New Ideas ◽  
Floating Type ◽  
Device Sensitivity

This research proposes a novel wireless RFID-based thermal convection type inclinometer design. Five new ideas are presented. The first one is to make the device on a flexible substrate, thus it can save more energy than the traditional silicon. The second one is to integrate both an inclinometer and a wireless RFID antenna on the same substrate, such that it is very convenient for usage. The third and the fourth ideas are to fill xenon gas in the chamber with hemi-cylindrical shape instead of the previous one with carbon dioxide and rectangular shape. Because the xenon gas would not produce oxidization effect to the heater, and it is more reliable. Besides, the xenon gas can increase the gas molecular weight and the device sensitivity. The fifth idea is to use non-floating structure instead of the floating one with a cavity in the substrate. Moreover, to increase the sensitivity the thermisters were stacked on one material such as alumina nitride. Note that the sensitivity curves by applying the non-floating structure with stacking material are more linear. Three kinds of stacking height were studied, such as 1, 1.5 and 2mm. One can see the combinations of AlN/Xenon are always better. If the largest sensitivity is the key consideration, then H2=1.5mm is the best choice (0.4°C/Degree), but the linear operating range is 45°. However, If the largest linear operating range is the requirement, then H2=2mm is the best one (75°), but the sensitivity is 0.173°C/Degree.

A Novel RFID-Based Thermal Convection Inclinometer on Flexible Substrate without Grooved Structure

2014 ◽  
Vol 530-531 ◽  
pp. 7-14
Author(s):  
Jium Ming Lin ◽  
Cheng Hung Lin ◽  
Chia Hsien Lin
Keyword(s):  
Response Time ◽  
Thermal Convection ◽  
Flexible Substrate ◽  
Response Speed ◽  
Cylindrical Shape ◽  
Average Response ◽  
Average Response Time ◽  
Floating Structure ◽  
Rectangular Chamber ◽  
The One

This research proposes a novel wireless RFID-based thermal convection type inclinometer by using non-floating structure without a cavity in the substrate. Four new ideas are presented. The first one is to make the device on a flexible substrate, thus it can save more energy than the traditional silicon. The second one is to integrate both an inclinometer and a wireless RFID antenna on the same substrate, such that it is a wireless device and very convenient for usage. The third idea is to fill xenon gas in the chamber with hemi-spherical or hemi-cylindrical shape instead of the previous one with carbon dioxide and rectangular shape. Because the xenon gas would not produce oxidization effect to the heater, so it would be more reliable. The fourth idea is to use non-floating structure instead of the floating one. The results by using floating structure with xenon and CO2gases are studied the first; but the sensitivity performances are not good. Note that the sensitivities for the proposed non-floating structure by using hemi-spherical chamber filled with xenon and CO2gases are better, and the one of the former is better than the latter by 70 %. On the other hand, the response speed (step-input of tilted angle) by using hemi-cylindrical chamber with xenon gas is the quickest, the average response time is 545μs, while the rectangular chamber filled with CO2is the slowest, and the average response time is 848μs.

Development of a low-cost backscattered semi-active RFID tag at 2.4 GHz

2007 ◽  
Vol 17 (6) ◽  
pp. 574-582 ◽  
Author(s):  
Nemai C. Karmakar ◽  
Sushim M. Roy ◽  
Stewart Jenvey ◽  
Stevan Preradovic ◽  
Trung D. Vo ◽  
...  
Keyword(s):  
Low Cost ◽  
Rfid Tag ◽  
Active Rfid
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