The Technique of Ion Beam Etching Polishing

2013 ◽  
Vol 395-396 ◽  
pp. 1066-1070
Author(s):  
Cheng Jun Guo ◽  
Ning Pei ◽  
Da Sen Wang ◽  
Feng Ming Nie ◽  
Guang Ping Zhang ◽  
...  
Keyword(s):  
Thin Film ◽  
Ion Beam ◽  
Optical Element ◽  
Material Surface ◽  
Optical Surface ◽  
Ion Beam Etching ◽  
Original Surface ◽  
Low Viscosity ◽  
Spatial Frequencies ◽  
Layer Thin Film

The accelerated gas ions collide with the surface material, the atom or molecule on material surface is removed by momentum transferring. Depositing a layer low viscosity of the thin film materials on the original surface of the optical, such materials will form a layer thin film on the surface of optical element that is lower than the original. Remove the high-spatial frequencies and obtain super precision optical surface.

Improvement of sensor performance of high-T/sub C/ thin film planar SQUID gradiometers by ion beam etching

1999 ◽  
Vol 9 (1) ◽  
pp. 71-76 ◽  
Author(s):  
S. Wunderlich ◽  
F. Schmidl ◽  
L. Dorrer ◽  
H. Schneidewind ◽  
P. Seidel
Keyword(s):  
Thin Film ◽  
Ion Beam ◽  
Ion Beam Etching ◽  
Sensor Performance

Planarization of diamond thin film surfaces by ion beam etching at grazing incidence angle

1996 ◽  
Vol 5 (6-8) ◽  
pp. 835-839 ◽  
Author(s):  
S. Ilias ◽  
G. Sené ◽  
P. Möller ◽  
V. Stambouli ◽  
J. Pascallon ◽  
...  
Keyword(s):  
Thin Film ◽  
Incidence Angle ◽  
Ion Beam ◽  
Grazing Incidence ◽  
Ion Beam Etching ◽  
Diamond Thin Film ◽  
Grazing Incidence Angle

Fracture Toughness of Titanium - Titanium Nitride Multi-Layer Thin Film

2008 ◽  
Author(s):  
Mohan Prasad Manoharan ◽  
Amit Desai ◽  
Amanul Haque
Keyword(s):  
Thin Film ◽  
Fracture Toughness ◽  
Titanium Nitride ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
New Class ◽  
Tin Coatings ◽  
Film Specimen ◽  
Cantilever Bending ◽  
Layer Thin Film

Thin film specimens of titanium - titanium nitride multilayer erosion resistant coating were prepared using liftout technique in Focused Ion Beam - Scanning Electron Microscope (SEM). The fracture toughness of the thin film specimen was measured in situ using a cantilever bending experiment in SEM to be 11.33 MPa/m0.5, twice as much as conventional TiN coatings. Ti–TiN multi-layer coatings are part of a new class of advanced erosion resistant coatings and this paper discusses an experimental technique to measure the fracture toughness of these coatings.

scholarly journals High Damage Resistivity of Optical Surface for UV Lasers by Ion Beam Etching.

1999 ◽  
Vol 27 (9) ◽  
pp. 623-627 ◽  
Author(s):  
Tomosumi KAMIMURA ◽  
Kazuhito NAKAI ◽  
Masashi YOSHIMURA ◽  
Yusuke MORI ◽  
Takatomo SASAKI ◽  
...  
Keyword(s):  
Ion Beam ◽  
Optical Surface ◽  
Ion Beam Etching ◽  
Uv Lasers
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