Consideration of Factors Towards Lowering the Natural Frequency of MEMS Based Cantilever Structure: Top Mass versus Back Etch Design

2015 ◽  
Vol 780 ◽  
pp. 39-44
Author(s):  
A.W. Khairul Adly ◽  
Y. Wahab ◽  
A.Y.M. Shakaff ◽  
Mazlee Mazalan

The ability to self-energize wireless sensor node promote the popularity of energy harvesting technique especially by using ambient vibration as the source of energy. In addition, the successful integration of the energy harvesting element on the same wafer as a wireless sensor node will promote the production in the MEMS scale and will reduce the overall cost of production. The usage of the cantilever structure as the transducer for converting mechanical energy (vibration) due to deflection of cantilever into the electrical energy is possible by depositing piezoelectric material on the cantilever. The usage of cantilever provide the simplest way for fabrication in the MEMS scale and also provide the ability to achieve low natural frequency. This paper present the work done on the simulation of the cantilever structure with the top end and back etch proof mass towards achieving low natural frequency in the MEMS scale by using IntelliSuite software.

2014 ◽  
Vol 2014 ◽  
pp. 1-5 ◽  
Author(s):  
Xihai Zhang ◽  
Junlong Fang ◽  
Fanfeng Meng ◽  
Xiaoli Wei

Wireless sensor networks (WSNs) have been expected to improve the capability of capturing mechanical vibration dynamic behaviors and evaluating the current health status of equipment. While the expectation for mechanical vibration monitoring using WSNs has been high, one of the key limitations is the limited lifetime of batteries for sensor node. The energy harvesting technologies have been recently proposed. One of them shares the same main idea, that is, energy harvesting from ambient vibration can be converted into electric power. Employing the vibration energy harvesting, a novel self-powered wireless sensor node has been developed to measure mechanical vibration in this paper. The overall architecture of node is proposed. The wireless sensor node is described into four main components: the energy harvesting unit, the microprocessor unit, the radio transceiver unit, and accelerometer. Moreover, the software used to control the operation of wireless node is also suggested. At last, in order to achieve continuous self-powered for nodes, two operation modes including the charging mode and discharging mode are proposed. This design can effectively solve the problem of continuous supply power of sensor node for mechanical vibration monitoring.


2016 ◽  
Vol 773 ◽  
pp. 012033
Author(s):  
M. A. Cowell ◽  
B. P. Lechene ◽  
P. Raffone ◽  
J. W. Evans ◽  
A. C. Arias ◽  
...  

2016 ◽  
Vol 3 (3) ◽  
Author(s):  
Fariborz Entezami ◽  
Meiling Zhu ◽  
Christos Politis

AbstractThere is a big challenge for research and industrial engineers to apply energy harvesting powered wireless sensors for practical applications. This is because wireless sensors is very power hungry while current energy harvesting systems can only harvest very limited energy from the ambient environment. In order for wireless sensors to be operated based on the limited energy harvested, understanding of power consumption of wireless sensors is the first task for implementation of energy harvesting powered wireless sensors systems. In this research an energy consumption model has been introduced for wireless sensor nodes and the power consumption in the life cycle of wireless communication sensors, consisting of JN5148 microcontroller and custom built sensors: a 3-axial accelerometer, a temperature sensor and a light sensor, has been studied. All measurements are based on a custom-built test bed. The power required carrying out a life cycle of wireless sensing and transmission is analysed. This paper describes how to analyse the current consumption of the system in active mode and thus power Consumption for sleeping and deployed sensors mode. The results show how much energy needs to run the energy harvesting powered wireless sensor node with JN5148 microcontroller.


Electronics ◽  
2016 ◽  
Vol 5 (4) ◽  
pp. 26 ◽  
Author(s):  
Ljubomir Vračar ◽  
Aneta Prijić ◽  
Damir Nešić ◽  
Saša Dević ◽  
Zoran Prijić

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