Phase Detection for Nanometer Scale Metal Film’s Thickness Based on SPR Effect

It is found that the phase position of p-component of reflected light changes with the metal film thickness, while the phase position of s-component almost doesn’t change in the Surface Plasmon Resonance effect. S-polarized light is taken as reference and interferometry is adopted to turn the change of the phase position into the change of interference fringes position in the paper, and the film thickness can be derived from it. The simulation results indicated that, through making use of piecewise quadratic fitting on the phase data, the inaccuracy with the range of film thickness is between 30 and 80 nanometers is not more than 0.33 nm.

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Determination of the threshold sensitivity of a deposited dielectric film thickness control method based on surface plasmon resonance effect

Journal of Physics Conference Series ◽

10.1088/1742-6596/1313/1/012033 ◽

2019 ◽

Vol 1313 ◽

pp. 012033

Author(s):

A E Komlev ◽

R V Dyukin ◽

E S Shutova

Keyword(s):

Surface Plasmon Resonance ◽

Film Thickness ◽

Surface Plasmon ◽

Plasmon Resonance ◽

Control Method ◽

Dielectric Film ◽

Resonance Effect ◽

Thickness Control ◽

Surface Plasmon Resonance Effect

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Dalnegroite, Tl5–xPb2x(As,Sb)2l–xS34, a new thallium sulphosalt from Lengenbach quarry, Binntal, Switzerland

Mineralogical Magazine ◽

10.1180/minmag.2009.073.6.1027 ◽

2009 ◽

Vol 73 (6) ◽

pp. 1027-1032 ◽

Cited By ~ 11

Author(s):

F. Nestola ◽

A. Guastoni ◽

L. Bindi ◽

L. Secco

Keyword(s):

Polarized Light ◽

New Mineral ◽

X Ray Diffraction ◽

X Ray ◽

Elemental Concentrations ◽

Reflected Light ◽

Mohs Hardness ◽

The Mean ◽

The University ◽

Probable Space

AbstractDalnegroite, ideally Tl4Pb2(As12Sb8)Σ20S34, is a new mineral from Lengenbach, Binntal, Switzerland. It occurs as anhedral to subhedral grains up to 200 μm across, closely associated with realgar, pyrite, Sb-rich seligmanite in a gangue of dolomite. Dalnegroite is opaque with a submetallic lustre and shows a brownish-red streak. It is brittle; the Vickers hardness (VHN25) is 87 kg mm-2(range: 69—101) (Mohs hardness ∼3—3½). In reflected light, dalnegroite is highly bireflectant and weakly pleochroic, from white to a slightly greenish-grey. In cross-polarized light, it is highly anisotropic with bluish to green rotation tints and red internal reflections.According to chemical and X-ray diffraction data, dalnegroite appears to be isotypic with chabournéite, Tl5-xPb2x(Sb,As)21-xS34. It is triclinic, probable space groupP1, witha= 16.217(7) Å,b= 42.544(9) Å,c= 8.557(4) Å, α = 95.72(4)°, β = 90.25(4)°, γ = 96.78(4)°,V= 5832(4) Å3,Z= 4.The nine strongest powder-diffraction lines [d(Å) (I/I0) (hkl)] are: 3.927 (100) (10 0); 3.775 (45) (22); 3.685 (45) (60); 3.620 (50) (440); 3.124 (50) (2); 2.929 (60) (42); 2.850 (70) (42); 2.579 (45) (02); 2.097 (60) (024). The mean of 11 electron microprobe analyses gave elemental concentrations as follows: Pb 10.09(1) wt.%, Tl 20.36(1), Sb 23.95(1), As 21.33(8), S 26.16(8), totalling 101.95 wt.%, corresponding to Tl4.15Pb2.03(As11.86Sb8.20)S34. The new mineral is named for Alberto Dal Negro, Professor in Mineralogy and Crystallography at the University of Padova since 1976.

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