Design of a VCM Actuator Using Halbach Magnet Array for Active Vibration Isolation System

This paper proposes the concept development and design of a VCM actuator for Active Vibration Isolation System (AVIS). Active vibration isolating method was constructed passive isolator and active isolator. Spring was used for isolating passively and actuator like voice coil motor was used for active isolating. The proposed active vibration isolating system could isolate a six degree-of-freedom disturbance effectively. In case of AVIS, payload is variable according to the type of instruments. Therefore, actuator should maintain uniform performance with payload change. The proposed VCM actuator satisfied this performance through relative relation between magnet array and coils. In addition, for maximizing actuator performance, actuator should generate large force density. Therefore, we apply the Halbach magnet array to proposed actuator. The Halbach magnet array helps with reinforcing magnetic flux field. The reinforced magnetic field takes a role to generate more powerful Lorentz force to isolate disturbance. Finally, in this paper, we propose the actuator that novel type using voice coil motor with the Halbach magnet array and optimize each design variables to generate maximum output. These AVIS can use to eliminate disturbance in Maglev stage. Maglev stage need AVIS to increase its performance is necessary. In the future, AVIS and Maglev system will be integrated.