Ultra-Precision Finishing of Micro Aspherical Surface by Ultrasonic Vibration Assisted Polishing

2005 ◽  
Vol 291-292 ◽  
pp. 349-354 ◽  
Author(s):  
H. Suzuki ◽  
R. Kawamori ◽  
M. Miyabara ◽  
T. Okino ◽  
Yasuto Hijikata ◽  
...  

Micro axis-symmetric aspherical glass lenses are being increasingly used in digital devices and optical devices. The glass lenses are molded by using micro ceramic dies such as tungsten carbide [1].Recently, as the pixel number of digital image sensors increases, the accuracy of micro molding dies are required to be much more precise than ever [2]. In this study, ultrasonic assisted polishing method is proposed and developed in order to finish micro axis-symmetric aspherical dies which were pre-ground with a diamond wheel [3]. In this paper, the proposed polishing method was applied to the micro aspherical molding dies to finish form compensation processing.

2018 ◽  
Vol 5 (5) ◽  
pp. 12426-12436 ◽  
Author(s):  
K. Naveen ◽  
Vignesh V. Shanbhag ◽  
N. Balashanmugam ◽  
Prakash Vinod

Procedia CIRP ◽  
2018 ◽  
Vol 77 ◽  
pp. 130-133
Author(s):  
Takumi Suetomi ◽  
Yasuhiro Kakinuma ◽  
Masahiko Fukuta ◽  
Katsutoshi Tanaka

2005 ◽  
Vol 291-292 ◽  
pp. 365-370 ◽  
Author(s):  
Wei Min Lin ◽  
Hitoshi Ohmori ◽  
T. Suzuki ◽  
Yoshihiro Uehara ◽  
Shinya MORITA

This paper describes an ultra precision polishing method of aspherical mirrors, and the fundamental research on polishing characteristics. The aspherical mirrors with a diameter of about 30mm made by fused silica glass and CVD-SiC were ELID (electrolytic in-process dressing)-ground to high form accuracy with #4000 cast iron bonded diamond wheel, and then polished with a small polishing tool. As the result, final surface roughness of 1.4nmRa and form accuracy of 1.2 μm was obtained.


2009 ◽  
Vol 3 (3) ◽  
pp. 227-232 ◽  
Author(s):  
Hirofumi Suzuki ◽  

Demands of micro aspheric optical components such as lenses and mirrors are increasing for installing to the digital devices. As the devices become to be more compact and complicated, the molds shapes of lens and mirrors would become more difficult to be machined and measured. In this study, multi-axis controlled ultra precision machining/grinding and on-machine measurement technologies are developed for manufacturing of the complicated and micro molds. In this paper, the next four technologies are focused: (1) micro fresnel grinding, (2) Micro lens array grinding, (3) Ultrasonic vibration assisted polishing, and (4) Contact type of multi axis controlled on-machine measuring system.


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