Simulation of the Flow Behavior of Thin Polymer Film during Nanoimprint Lithography Based on a Viscoelastic Model

2009 ◽  
Vol 419-420 ◽  
pp. 509-512
Author(s):  
Xi Qiu Fan
Keyword(s):  
Polymer Film ◽  
Nanoimprint Lithography ◽  
Flow Behavior ◽  
Polymer Surface ◽  
Sudden Change ◽  
Viscoelastic Model ◽  
Flow Behaviour ◽  
Thin Polymer Film ◽  
Limited Area ◽  
Thin Polymer

Based on viscoelastic fluid mechanics, this paper presents a simulation model of the flow behaviour of thin polymer film during nanoimprint lithography (NIL). The polymer is imprinted at a constant temperature of 180oC and at a constant imprint speed of 100nm/s by using a tool with a single convex feature of 100 nm in width and 500 nm in height. At the imprint beginning, only a very limited area adjacent to the tool top is affected by the imprint, but subjects to a sudden change of pressure. With the imprint process forward, the wave-like polymer front and the trumpet-shaped profile are predicted to travel out from the imprint patterns. When the tool base intimately contacts the polymer film, another sudden change of the pressure occurs in the area under the interface between the polymer surface and the tool base. These results are of significance to understand the flow behaviour of NIL.

Exploiting cellular convection in a thick liquid layer to pattern a thin polymer film

2016 ◽  
Vol 108 (5) ◽  
pp. 051604 ◽  
Author(s):  
Iman Nejati ◽  
Mathias Dietzel ◽  
Steffen Hardt
Keyword(s):  
Polymer Film ◽  
Liquid Layer ◽  
Thin Polymer Film ◽  
Thin Polymer

Finite Thickness Influence on Spherical and Conical Indentation on Viscoelastic Thin Polymer Film

2005 ◽  
Vol 127 (1) ◽  
pp. 33-37 ◽  
Author(s):  
V. Gonda ◽  
J. den Toonder ◽  
J. Beijer ◽  
G. Q. Zhang ◽  
L. J. Ernst
Keyword(s):  
Polymer Film ◽  
Material Properties ◽  
Finite Thickness ◽  
Thin Polymer Film ◽  
Spherical Indentation ◽  
Infinite Plane ◽  
Precise Knowledge ◽  
Thin Polymer ◽  
Measurement Results ◽  
Conical Indentation

The thermo-mechanical integration of polymer films requires a precise knowledge of material properties. Nanoindentation is a widely used testing method for the determination of material properties of thin films such as Young’s modulus and the hardness. An important assumption in the analysis of the indentation is that the indented medium is a semi-infinite plane or half space, i.e., it has an “infinite thickness.” In nanoindentation the analyzed material is often a thin film that is deposited on a substrate. If the modulus ratio is small, (soft film on hard substrate) and the penetration depth is small too, then the Hertzian assumption does not hold. We investigate this situation with spherical and conical indentation. Measurement results are shown using spherical indentation on a visco-elastic thin polymer film and a full visco-elastic characterization is presented.

scholarly journals Functional patterned coatings by thin polymer film dewetting

2017 ◽  
Vol 507 ◽  
pp. 453-469 ◽  
Author(s):  
Andrew M. Telford ◽  
Stuart C. Thickett ◽  
Chiara Neto
Keyword(s):  
Polymer Film ◽  
Thin Polymer Film ◽  
Thin Polymer

Rubber-Assisted Hot Embossing for Structuring Thin Polymer Film Polymeric Films

2006 ◽  
Author(s):  
Pratapkumar Nagarajan ◽  
Donggang Yao
Keyword(s):  
Thin Films ◽  
Film Thickness ◽  
Polymer Film ◽  
Hot Embossing ◽  
Polymeric Films ◽  
Thin Polymer Film ◽  
Thin Polymer Films ◽  
Process Variables ◽  
Hard Materials ◽  
Thin Polymer

Precision structured polymer thin films with microstructures comparable to or greater than the film thickness are highly desired in many applications. Such micro-patterned thin films, however, are difficult to fabricate using the standard hot embossing technology where both halves of the mold are made of hard materials. This study investigated a rubber-assisted embossing process for structuring thin polymer films. The advantages of the rubber backup instead of a hard support include but are not limited to 1) simplifying the embossing tool, 2) protecting the embossing master, 3) facilitating embossing pressure buildup, and 4) accommodating conformal forming of microscale shell patterns. Several design and process variables including rubber hardness, embossing temperature, embossing pressure and holding time were carefully studied. Thin polystyrene films in a thickness of 25 μm were accurately patterned with microgrooves of characteristic dimensions on the order of 100 μm.

scholarly journals Self-Assembly of Octapod-Shaped Colloidal Nanocrystals into a Hexagonal Ballerina Network Embedded in a Thin Polymer Film

Nano Letters ◽  
2014 ◽  
Vol 14 (2) ◽  
pp. 1056-1063 ◽  
Author(s):  
Milena P. Arciniegas ◽  
Mee R. Kim ◽  
Joost De Graaf ◽  
Rosaria Brescia ◽  
Sergio Marras ◽  
...  
Keyword(s):  
Polymer Film ◽  
Self Assembly ◽  
Colloidal Nanocrystals ◽  
Thin Polymer Film ◽  
Thin Polymer

Photocurrent of purple membrane adsorbed onto a thin polymer film: action characteristics of the local anesthetics

2002 ◽  
Vol 23 (4) ◽  
pp. 375-382 ◽  
Author(s):  
A Shibata ◽  
A Yorimitsu ◽  
H Ikema ◽  
K Minami ◽  
S Ueno ◽  
...  
Keyword(s):  
Polymer Film ◽  
Local Anesthetics ◽  
Purple Membrane ◽  
Thin Polymer Film ◽  
Thin Polymer

scholarly journals Kinetics of thin polymer film rupture: Model experiments for a better understanding of layer breakups in the multilayer coextrusion process

Polymer ◽  
2016 ◽  
Vol 90 ◽  
pp. 156-164 ◽  
Author(s):  
Y. Zhu ◽  
A. Bironeau ◽  
F. Restagno ◽  
C. Sollogoub ◽  
G. Miquelard-Garnier
Keyword(s):  
Polymer Film ◽  
Thin Polymer Film ◽  
Film Rupture ◽  
Model Experiments ◽  
Thin Polymer ◽  
Rupture Model ◽  
Kinetics Of
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