Low-Energy Ion Technique for Semiconductor Surface Preparation

2018 ◽  
Vol 284 ◽  
pp. 198-203
Author(s):  
S.N. Chebotarev ◽  
V.A. Irkha ◽  
Adnan A.A. Mohamed

We proposed an experimental technique for determining the sputtering yields of two-component semiconductors – gallium arsenide and indium arsenide by low-energy argon ions. It was suggested to measure the volume of a crater formed by inert ions bombarding on the target surface using the method of scanning laser confocal microscopy. It was demonstrated that in the energy range from 100 to 300 eV, the energy dependence of sputtering yields for these materials is practically linear. It is established that the sputtering yields for normal bombardment by argon ions at optimum energy of 150 eV are equal to Y(GaAs) = 0.41 and Y(InAs) = 0.73. It is found that an increase in the etching time of the surface of gallium arsenide and indium arsenide leads to a characteristic transformation of the surface relief. The studies of the sputtering of two-component targets indicate the initial strong non-stechiometry. Etching for a certain period of time leads to an equalization of the concentrations of the sputtered components. It was found that to obtain a uniform composition of the mass flow it is necessary to pre-sputter the targets with shielded substrates.

2018 ◽  
Vol 14 (1) ◽  
pp. 41-50
Author(s):  
S.N. Chebotarev ◽  
◽  
M.L. Lunina ◽  
D.L. Alfimova ◽  
G.A. Erimeev ◽  
...  

2017 ◽  
Vol 496 ◽  
pp. 18-23 ◽  
Author(s):  
E. Marenkov ◽  
K. Nordlund ◽  
I. Sorokin ◽  
A. Eksaeva ◽  
K. Gutorov ◽  
...  
Keyword(s):  

Author(s):  
Turker Oktay

Surface texture of engine components such as crankshafts and camshafts is one of the most important factors that determine the performance, efficiency and the operating life of an internal combustion engine. Current practices and the challenges faced by design engineers in specifying the target surface topography to meet these goals have been reviewed. Once specified, the surface texture must be measured fast, accurately and repeatably in the rough environment of an engine manufacturing plant. The key components of an automated skidded surface finish measuring gage designed with these criteria in mind are described in this paper. The gage has 7 axes of motion and 3 stylus probes oriented in the axial and radial directions to take axial and facial measurements on journal and cam lobe surfaces and thrust bearing surfaces. The selection of surface texture parameters to best describe the desired surface texture of these engine components was investigated. The final stage of surface preparation is often the superfinishing process. The measurement gage must be able to provide the sensitivity and repeatability that are required for measuring the finely finished surfaces generated by this process. Typical surface texture results of a superfinishing process achieved on crankshafts are described. The results of a Gage Repeatability and Reproducibility (R&R) study performed on the surface texture measuring gage are presented.


2000 ◽  
Author(s):  
De-Quan Yang ◽  
Yuqing Xiong ◽  
Weigang Lu ◽  
Yun Guo ◽  
Dao-an Da
Keyword(s):  

2020 ◽  
Vol 124 (45) ◽  
pp. 24795-24808
Author(s):  
Elif Bilgilisoy ◽  
Rachel M. Thorman ◽  
Jo-Chi Yu ◽  
Timothy B. Dunn ◽  
Hubertus Marbach ◽  
...  

2009 ◽  
Vol 106 (5) ◽  
pp. 054902 ◽  
Author(s):  
Shiou-Min Wu ◽  
Robbert van de Kruijs ◽  
Erwin Zoethout ◽  
Fred Bijkerk
Keyword(s):  

Sign in / Sign up

Export Citation Format

Share Document