scholarly journals Surface Reactions on the Bi4-xLaxTiO3O12Thin Films Etched in Inductively Coupled CF4/Ar Plasma

2003 ◽  
Vol 16 (5) ◽  
pp. 378-384
Keyword(s):  
Surface Reactions ◽  
Inductively Coupled ◽  
Ar Plasma

ChemInform Abstract: Inductively Coupled Ar Plasma Damage in AlGaAs.

ChemInform ◽  
2010 ◽  
Vol 28 (52) ◽  
pp. no-no
Author(s):  
J. W. LEE ◽  
D. HAYS ◽  
C. R. ABERNATHY ◽  
S. J. PEARTON ◽  
W. S. HOBSON ◽  
...  
Keyword(s):  
Plasma Damage ◽  
Inductively Coupled ◽  
Ar Plasma

Etching mechanism of MgO thin films in inductively coupled Cl2∕Ar plasma

2004 ◽  
Vol 22 (5) ◽  
pp. 2101-2106 ◽  
Author(s):  
A. M. Efremov ◽  
Seong-Mo Koo ◽  
Dong-Pyo Kim ◽  
Kyoung-Tae Kim ◽  
Chang-Il Kim
Keyword(s):  
Thin Films ◽  
Inductively Coupled ◽  
Etching Mechanism ◽  
Ar Plasma

Etching properties of Na0.5K0.5NbO3 thin films by using inductively coupled CF4/Ar plasma

2014 ◽  
Vol 114 ◽  
pp. 1-6 ◽  
Author(s):  
Young-Hee Joo ◽  
Jong-Chang Woo ◽  
Chang-Il Kim
Keyword(s):  
Thin Films ◽  
Inductively Coupled ◽  
Ar Plasma

Effects of the inductively coupled Ar plasma etching on the performance of (111) face CdZnTe detector

2020 ◽  
Vol 109 ◽  
pp. 104929 ◽  
Author(s):  
Bing Song ◽  
Jijun Zhang ◽  
Xiaoyan Liang ◽  
Shuhao Zhao ◽  
Jiahua Min ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Cdznte Detector ◽  
Inductively Coupled ◽  
Ar Plasma

Etching of As- and P-based III–V semiconductors in a planar inductively coupled BCl3/Ar plasma

2004 ◽  
Vol 33 (4) ◽  
pp. 358-363 ◽  
Author(s):  
J. W. Lee ◽  
W. T. Lim ◽  
I. K. Baek ◽  
S. R. Yoo ◽  
M. H. Jeon ◽  
...  
Keyword(s):  
Inductively Coupled ◽  
Ar Plasma

Etching characteristics of Al2O3 thin films in inductively coupled BCl3/Ar plasma

Vacuum ◽  
2008 ◽  
Vol 82 (11) ◽  
pp. 1198-1202 ◽  
Author(s):  
Sun Jin Yun ◽  
Alexander Efremov ◽  
Mansu Kim ◽  
Dae-Won Kim ◽  
Jung Wook Lim ◽  
...  
Keyword(s):  
Thin Films ◽  
Inductively Coupled ◽  
Ar Plasma

HfO2 etching mechanism in inductively-coupled Cl2/Ar plasma

2011 ◽  
Vol 519 (20) ◽  
pp. 6708-6711 ◽  
Author(s):  
Moonkeun Kim ◽  
Alexander Efremov ◽  
Hyun Woo Lee ◽  
Hyung-Ho Park ◽  
MunPyo Hong ◽  
...  
Keyword(s):  
Inductively Coupled ◽  
Etching Mechanism ◽  
Ar Plasma
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