ArF Excimer Laser Annealing of Polycrystalline Silicon Thin Film

Crystallization - Science and Technology ◽

10.5772/52458 ◽

2012 ◽

Author(s):

Noriah Bidin ◽

Siti Noraiza Ab Razak

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Polycrystalline Silicon ◽

Laser Annealing ◽

Silicon Thin Film ◽

Excimer Laser Annealing ◽

Arf Excimer Laser

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Impact of AC Stress in Low Temperature Polycrystalline Silicon Thin Film Transistors Produced with Different Excimer Laser Annealing Energies

IEEE Electron Device Letters ◽

10.1109/led.2021.3073200 ◽

2021 ◽

pp. 1-1

Author(s):

Yu-Zhe Zheng ◽

Chia-Chuan Wu ◽

Po-Hsun Chen ◽

Ting-Chang Chang ◽

Kuan-Ju Zhou ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Excimer Laser ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Laser Annealing ◽

Silicon Thin Film ◽

Excimer Laser Annealing

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Effect of excimer laser annealing on the structural and electrical properties of polycrystalline silicon thin-film transistors

Journal of Applied Physics ◽

10.1063/1.371409 ◽

1999 ◽

Vol 86 (8) ◽

pp. 4600-4606 ◽

Author(s):

C. T. Angelis ◽

C. A. Dimitriadis ◽

M. Miyasaka ◽

F. V. Farmakis ◽

G. Kamarinos ◽

...

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Excimer Laser ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Laser Annealing ◽

Silicon Thin Film ◽

Excimer Laser Annealing ◽

Structural And Electrical Properties

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Crystallization of polycrystalline silicon thin film by excimer laser annealing, ELA

2010 International Conference on Enabling Science and Nanotechnology (ESciNano) ◽

10.1109/escinano.2010.5701062 ◽

2010 ◽

Author(s):

S. Noraiza Ab. Razak ◽

Noriah Bidin

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Polycrystalline Silicon ◽

Laser Annealing ◽

Silicon Thin Film ◽

Excimer Laser Annealing

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Erratum: “Effect of excimer laser annealing on the structural and electrical properties of polycrystalline silicon thin-film transistors” [J. Appl. Phys. 86, 4600 (1999)]

Journal of Applied Physics ◽

10.1063/1.372060 ◽

2000 ◽

Vol 87 (3) ◽

pp. 1588-1588 ◽

Author(s):

C. T. Angelis ◽

C. A. Dimitriadis ◽

M. Miyasaka ◽

F. V. Farmakis ◽

G. Kamarinos ◽

...

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Excimer Laser ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Laser Annealing ◽

Silicon Thin Film ◽

Excimer Laser Annealing ◽

Structural And Electrical Properties

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Polycrystalline Silicon Thin Film Transistors Fabricated by Employing Selective Self Ion-Implantation and Excimer Laser Annealing

Journal of the Korean Physical Society ◽

10.3938/jkps.37.870 ◽

2000 ◽

Vol 37 (6) ◽

pp. 870 ◽

Author(s):

Lee Min-Cheol ◽

Jeon Jae-Hong ◽

Jung Sang-Hoon ◽

Han Min-Koo

Keyword(s):

Thin Film ◽

Ion Implantation ◽

Excimer Laser ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Laser Annealing ◽

Silicon Thin Film ◽

Excimer Laser Annealing

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High-Performance Polycrystalline Silicon Thin-Film Transistors Fabricated by High-Temperature Process with Excimer Laser Annealing

Japanese Journal of Applied Physics ◽

10.1143/jjap.43.3293 ◽

2004 ◽

Vol 43 (6A) ◽

pp. 3293-3296 ◽

Author(s):

Hiroaki Jiroku ◽

Mitsutoshi Miyasaka ◽

Satoshi Inoue ◽

Yoshifumi Tsunekawa ◽

Tatsuya Shimoda

Keyword(s):

Thin Film ◽

High Temperature ◽

Excimer Laser ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

High Performance ◽

Laser Annealing ◽

Silicon Thin Film ◽

Excimer Laser Annealing ◽

High Temperature Process

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Drastic improvement of as-sputtered silicon nitride thin film quality at room temperature by ArF excimer-laser annealing method

Current Applied Physics ◽

10.1016/j.cap.2016.03.017 ◽

2016 ◽

Vol 16 (8) ◽

pp. 876-885 ◽

Author(s):

D.H. Choi ◽

H.S. Kim ◽

S.Y. Oh ◽

C.H. Lee

Keyword(s):

Thin Film ◽

Silicon Nitride ◽

Excimer Laser ◽

Room Temperature ◽

Laser Annealing ◽

Excimer Laser Annealing ◽

Arf Excimer Laser ◽

Annealing Method

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Application of Excimer-Laser Annealing to Amorphous, Poly-Crystal and Single-Crystal Silicon Thin-Film Transistors

phys stat sol (a) ◽

10.1002/(sici)1521-396x(199804)166:2<715::aid-pssa715>3.0.co;2-l ◽

1998 ◽

Vol 166 (2) ◽

pp. 715-728 ◽

Author(s):

M. Matsumura

Keyword(s):

Thin Film ◽

Single Crystal ◽

Excimer Laser ◽

Thin Film Transistors ◽

Laser Annealing ◽

Single Crystal Silicon ◽

Silicon Thin Film ◽

Excimer Laser Annealing ◽

Crystal Silicon

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Aligned Polycrystalline Silicon Array Thin Film by XeCl Excimer Laser Annealing for AMOLED Displays

Solid State Phenomena - Advances in Nanomaterials and Processing ◽

10.4028/3-908451-31-0.371 ◽

2007 ◽

pp. 371-374

Author(s):

C.N. Chen ◽

G.M. Wu ◽

W.S. Feng

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Polycrystalline Silicon ◽

Laser Annealing ◽

Excimer Laser Annealing ◽

Xecl Excimer Laser

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On-Chip Bottom-Gate Polysilicon and Amorphous Silicon Thin-Film Transistors Using Excimer Laser Annealing

Japanese Journal of Applied Physics ◽

10.1143/jjap.29.l1775 ◽

1990 ◽

Vol 29 (Part 2, No. 10) ◽

pp. L1775-L1777 ◽

Author(s):

Kazuhiro Shimizu ◽

Osamu Sugiura ◽

Masakiyo Matsumura

Keyword(s):

Thin Film ◽

Amorphous Silicon ◽

Excimer Laser ◽

Thin Film Transistors ◽

Laser Annealing ◽

Silicon Thin Film ◽

Excimer Laser Annealing ◽

On Chip ◽

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