Two-dimensional particle-in-cell simulation of the ion sheath dynamics in plasma source ion implantation of a hemispherical bowl-shaped target
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1994 ◽
Vol 12
(2)
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pp. 884
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1997 ◽
Vol 93
(2-3)
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pp. 247-253
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1996 ◽
Vol 29
(1)
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pp. 274-276
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2011 ◽
Vol 39
(11)
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pp. 3140-3143
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