Two-dimensional particle-in-cell plasma source ion implantation of a prolate spheroid target
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1994 ◽
Vol 12
(2)
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pp. 884
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2002 ◽
Vol 156
(1-3)
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pp. 97-102
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1997 ◽
Vol 93
(2-3)
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pp. 247-253
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1996 ◽
Vol 29
(1)
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pp. 274-276
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