Many MEMS/NEMS sensors, including gyroscopes, chemical sensors, and RF filters utilize the mechanical resonance of the MEMS/NEMS structure as a highly sensitive detector. Typically, changes in the external environment lead to changes in the resonant frequency or amplitude. Due to the low-loss of micro and nano mechanical structures, large quality factors are achievable, leading to sharp resonance curves that change greatly after only small changes in the environment. This allows sensitive detectors, but also leads to poor stability and tight fabrication tolerances. This paper will discuss these issues as well as mitigation techniques including feedback control, tuning, differential operation, and sensor fusion, amongst others.