Challenges Facing Resonant MEMS Sensors

2010 ◽  
Vol 2010 (DPC) ◽  
pp. 001401-001425
Author(s):  
Michael Kranz
Keyword(s):  
Chemical Sensors ◽  
Sensitive Detector ◽  
Quality Factors ◽  
Mems Sensors ◽  
Low Loss ◽  
Rf Filters ◽  
Highly Sensitive ◽  
Differential Operation ◽  
Fabrication Tolerances ◽  
Poor Stability

Many MEMS/NEMS sensors, including gyroscopes, chemical sensors, and RF filters utilize the mechanical resonance of the MEMS/NEMS structure as a highly sensitive detector. Typically, changes in the external environment lead to changes in the resonant frequency or amplitude. Due to the low-loss of micro and nano mechanical structures, large quality factors are achievable, leading to sharp resonance curves that change greatly after only small changes in the environment. This allows sensitive detectors, but also leads to poor stability and tight fabrication tolerances. This paper will discuss these issues as well as mitigation techniques including feedback control, tuning, differential operation, and sensor fusion, amongst others.

Highly sensitive and stable phenyl hydrazine chemical sensors based on CuO flower shapes and hollow spheres

2013 ◽  
Vol 37 (4) ◽  
pp. 1098 ◽  
Author(s):  
Sher Bahadar Khan ◽  
M. Faisal ◽  
Mohammed M. Rahman ◽  
I. A. Abdel-Latif ◽  
Adel A. Ismail ◽  
...  
Keyword(s):  
Chemical Sensors ◽  
Hollow Spheres ◽  
Phenyl Hydrazine ◽  
Highly Sensitive

Application progress of magnetic molecularly imprinted polymer chemical sensors in the detection of biomarkers

The Analyst ◽  
2022 ◽  
Author(s):  
Ying Wang ◽  
Xiaomin Yang ◽  
Lin Pang ◽  
Pengfei Geng ◽  
Fang Mi ◽  
...  
Keyword(s):  
Chemical Sensors ◽  
Molecularly Imprinted Polymers ◽  
Essential Role ◽  
Imprinted Polymer ◽  
Molecularly Imprinted ◽  
Magnetic Molecularly Imprinted Polymer ◽  
Magnetic Molecularly Imprinted Polymers ◽  
Highly Sensitive ◽  
Detection Of Biomarkers ◽  
Highly Sensitive Detection

Specific recognition and highly sensitive detection of biomarkers play an essential role in identifying, early diagnosis and prevention of many diseases. Magnetic molecularly imprinted polymers (MMIP) have been widely used...

scholarly journals Strong light-matter coupling in dielectric metasurfaces

2020 ◽  
Vol 238 ◽  
pp. 05004
Author(s):  
Gabriel W. Castellanos ◽  
Shunsuke Murai ◽  
T.V. Raziman ◽  
Shaojun Wang ◽  
Mohammad Ramezani ◽  
...  
Keyword(s):  
Strong Coupling ◽  
Silicon Nanoparticles ◽  
Organic Molecules ◽  
Quality Factors ◽  
Low Loss ◽  
Strong Light ◽  
Large Coupling ◽  
Exciton Polaritons ◽  
Coupling Strengths ◽  
Individual Nanoparticles

We demonstrate the strong coupling between excitons in organic molecules and all-dielectric metasurfaces formed by arrays of silicon nanoparticles supporting Mie surface lattice resonances (MSLRs). Compared to Mie resonances in individual nanoparticles, MSLRs have extended mode volumes and much larger quality factors, which enables to achieve collective strong coupling with very large coupling strengths and Rabi energies. Moreover, due to the electric and magnetic character of the MSLR given by the Mie resonance, we show that the hybridization of the exciton with the MSLR results in exciton-polaritons that inherit this character as well. Our results demonstrate the potential of all-dielectric metasurfaces as novel platform to investigate and manipulate exciton-polaritons in low-loss polaritonic devices.

Novel designs of SAW devices for highly sensitive chemical sensors

2018 ◽  
Vol 5 (7) ◽  
pp. 15371-15375
Author(s):  
Lokesh Rana ◽  
Reema Gupta ◽  
Anjali Sharma ◽  
Vinay Gupta ◽  
Monika Tomar
Keyword(s):  
Chemical Sensors ◽  
Saw Devices ◽  
Highly Sensitive

A Highly Sensitive Detector for Radiation in the Terahertz Region

2007 ◽  
Vol 56 (2) ◽  
pp. 463-467 ◽  
Author(s):  
P. Kleinschmidt ◽  
S.P. Giblin ◽  
V. Antonov ◽  
H. Hashiba ◽  
L. Kulik ◽  
...  
Keyword(s):  
Sensitive Detector ◽  
Terahertz Region ◽  
Highly Sensitive

scholarly journals Highly Sensitive Bulk Silicon Chemical Sensors with Sub-5 nm Thin Charge Inversion Layers

ACS Nano ◽  
2018 ◽  
Vol 12 (3) ◽  
pp. 2948-2954 ◽  
Author(s):  
Hossain M. Fahad ◽  
Niharika Gupta ◽  
Rui Han ◽  
Sujay B. Desai ◽  
Ali Javey
Keyword(s):  
Chemical Sensors ◽  
Bulk Silicon ◽  
Charge Inversion ◽  
Highly Sensitive

scholarly journals Subwavelength Silicon Nanoblocks for Directional Emission Manipulation

Nanomaterials ◽  
2020 ◽  
Vol 10 (6) ◽  
pp. 1242
Author(s):  
Tianyue Zhang ◽  
Xuewei Li ◽  
Jian Xu ◽  
Xiaoming Zhang ◽  
Zi-Lan Deng ◽  
...  
Keyword(s):  
Light Emission ◽  
Coupled System ◽  
Low Loss ◽  
Preferential Direction ◽  
Nanophotonic Devices ◽  
Directional Emission ◽  
Direct Light ◽  
Highly Sensitive ◽  
Field Radiation ◽  
Magnetic Resonances

Manipulating the light emission direction and boosting its directivity have essential importance in integrated nanophotonic devices. Here, we theoretically propose a single dielectric silicon nanoblock as an efficient, multifunctional and ultracompact all-dielectric nanoantenna to direct light into a preferential direction. Unidirectional scattering of a plane wave as well as switchable directive emission fed by a localized emitter are demonstrated within the nanoantenna. The high directionalities are revealed to originate from a variety of mechanisms that can coexist within a single nanoblock, which contribute to the far-field radiation patterns of the outcoming light, thanks to the wealth of multipolar electric and magnetic resonances. The efficient beam redirections are also observed, which are sensitive to the local configurations of the emitter antenna coupled system. The designed antenna, with extreme geometry simplicity, ultracompact and low-loss features, could be favorable for highly sensitive sensing as well as applications in optical nanocircuits.

scholarly journals Dissipation Analysis Methods and Q-Enhancement Strategies in Piezoelectric MEMS Laterally Vibrating Resonators: A Review

Sensors ◽  
2020 ◽  
Vol 20 (17) ◽  
pp. 4978 ◽  
Author(s):  
Cheng Tu ◽  
Joshua E.-Y. Lee ◽  
Xiao-Sheng Zhang
Keyword(s):  
Integrated Circuit ◽  
High Sensitivity ◽  
Low Noise ◽  
Quality Factors ◽  
Rf Filters ◽  
Resonant Sensors ◽  
Sensing Applications ◽  
Analysis Methods ◽  
Mems Resonators ◽  
Piezoelectric Mems

Over the last two decades, piezoelectric resonant sensors based on micro-electromechanical systems (MEMS) technologies have been extensively studied as such sensors offer several unique benefits, such as small form factor, high sensitivity, low noise performance and fabrication compatibility with mainstream integrated circuit technologies. One key challenge for piezoelectric MEMS resonant sensors is enhancing their quality factors (Qs) to improve the resolution of these resonant sensors. Apart from sensing applications, large values of Qs are also demanded when using piezoelectric MEMS resonators to build high-frequency oscillators and radio frequency (RF) filters due to the fact that high-Q MEMS resonators favor lowering close-to-carrier phase noise in oscillators and sharpening roll-off characteristics in RF filters. Pursuant to boosting Q, it is essential to elucidate the dominant dissipation mechanisms that set the Q of the resonator. Based upon these insights on dissipation, Q-enhancement strategies can then be designed to target and suppress the identified dominant losses. This paper provides a comprehensive review of the substantial progress that has been made during the last two decades for dissipation analysis methods and Q-enhancement strategies of piezoelectric MEMS laterally vibrating resonators.

Sign in / Sign up

Export Citation Format

Share Document