A novel photoresist-based film-profile engineering scheme for fabricating double-gated, recess-channel IGZO thin-film transistors

Japanese Journal of Applied Physics ◽

10.7567/1347-4065/ab650a ◽

2020 ◽

Vol 59 (SG) ◽

pp. SGGJ01

Author(s):

Yu-An Huang ◽

Kang-Pin Peng ◽

Yu-Chiao Meng ◽

Chun-Jung Su ◽

Pei-Wen Li ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Engineering Scheme ◽

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Fabrication of Sub-50nm ZnO thin-film transistors with film profile engineering and laminated hardmask structure

2015 International Symposium on VLSI Technology, Systems and Applications ◽

10.1109/vlsi-tsa.2015.7117553 ◽

2015 ◽

Author(s):

Rong-Jhe Lyu ◽

Horng-Chih Lin ◽

Tiao-Yuan Huang

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Zno Thin Film ◽

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A Platform with Exquisite Film Profile Engineering in Oxide-Based Thin-Film Transistors for More-than-Moore Applications

2019 IEEE 13th International Conference on ASIC (ASICON) ◽

10.1109/asicon47005.2019.8983485 ◽

2019 ◽

Author(s):

Horng-Chih Lin ◽

Yu-An Huang

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

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Film-profile-engineered IGZO thin-film transistors with gate/drain offset for high voltage operation

2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) ◽

10.1109/ipfa.2016.7564298 ◽

2016 ◽

Author(s):

Ming-Hung Wu ◽

Horng-Chih Lin ◽

Pei-Wen Li ◽

Tiao-Yuan Huang

Keyword(s):

Thin Film ◽

High Voltage ◽

Thin Film Transistors ◽

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Submicrometer p-Type SnO Thin-Film Transistors Fabricated by Film Profile Engineering Method

IEEE Transactions on Electron Devices ◽

10.1109/ted.2019.2897813 ◽

2019 ◽

Vol 66 (4) ◽

pp. 1766-1771 ◽

Author(s):

Ming-Hung Wu ◽

Horng-Chih Lin ◽

Pei-Wen Li

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Engineering Method ◽

P Type ◽

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Implementation of Film Profile Engineering in the Fabrication of ZnO Thin-Film Transistors

IEEE Transactions on Electron Devices ◽

10.1109/ted.2014.2313344 ◽

2014 ◽

Vol 61 (5) ◽

pp. 1417-1422 ◽

Author(s):

Rong-Jhe Lyu ◽

Horng-Chih Lin ◽

Tiao-Yuan Huang

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Zno Thin Film ◽

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Short-channel ZnON thin-film transistors with film profile engineering

2016 IEEE Silicon Nanoelectronics Workshop (SNW) ◽

10.1109/snw.2016.7577988 ◽

2016 ◽

Author(s):

Chin-I Kuan ◽

Horng-Chih Lin ◽

Pei-Wen Li ◽

Tiao-Yuan Huang

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Short Channel ◽

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Downscaling Metal—Oxide Thin-Film Transistors to Sub-50 nm in an Exquisite Film-Profile Engineering Approach

IEEE Transactions on Electron Devices ◽

10.1109/ted.2016.2646221 ◽

2017 ◽

Vol 64 (3) ◽

pp. 1069-1075 ◽

Author(s):

Rong-Jhe Lyu ◽

Bo-Shiuan Shie ◽

Horng-Chih Lin ◽

Pei-Wen Li ◽

Tiao-Yuan Huang

Keyword(s):

Thin Film ◽

Metal Oxide ◽

Thin Film Transistors ◽

Oxide Thin Film ◽

Engineering Approach ◽

Metal Oxide Thin Film ◽

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100-nm IGZO Thin-Film Transistors With Film Profile Engineering

IEEE Transactions on Electron Devices ◽

10.1109/ted.2014.2318703 ◽

2014 ◽

Vol 61 (6) ◽

pp. 2224-2227 ◽

Author(s):

Horng-Chih Lin ◽

Bo-Shiuan Shie ◽

Tiao-Yuan Huang

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

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Impact of Residual Hardmask Wires on the Performance of Film-Profile-Engineered ZnO Thin-Film Transistors With Discrete Bottom Gates

IEEE Electron Device Letters ◽

10.1109/led.2015.2445772 ◽

2015 ◽

Vol 36 (8) ◽

pp. 796-798 ◽

Author(s):

Rong-Jhe Lyu ◽

Horng-Chih Lin ◽

Tiao-Yuan Huang

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Zno Thin Film ◽

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Fabrication of IGZO Thin-Film Transistors with Film Profile Engineering

10.7567/ssdm.2014.e-7-4 ◽

2014 ◽

Author(s):

R.J. Lyu ◽

H.C. Lin ◽

T.Y. Huang

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

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